JPS63200327U - - Google Patents

Info

Publication number

JPS63200327U

JPS63200327U JP8971487U JP8971487U JPS63200327U JP S63200327 U JPS63200327 U JP S63200327U JP 8971487 U JP8971487 U JP 8971487U JP 8971487 U JP8971487 U JP 8971487U JP S63200327 U JPS63200327 U JP S63200327U

Authority

JP

Japan

Prior art keywords

wafer boat

substrate

substrates

supports

circumference

Prior art date

1987-06-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims 4
• 238000010438 heat treatment Methods 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 description 7
• 238000010586 diagram Methods 0.000 description 5
• 238000005259 measurement Methods 0.000 description 1