JPS63198811A - 微小変位量検出器 - Google Patents
微小変位量検出器Info
- Publication number
- JPS63198811A JPS63198811A JP3115287A JP3115287A JPS63198811A JP S63198811 A JPS63198811 A JP S63198811A JP 3115287 A JP3115287 A JP 3115287A JP 3115287 A JP3115287 A JP 3115287A JP S63198811 A JPS63198811 A JP S63198811A
- Authority
- JP
- Japan
- Prior art keywords
- converter
- data
- output
- differential amplifier
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 24
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3115287A JPS63198811A (ja) | 1987-02-13 | 1987-02-13 | 微小変位量検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3115287A JPS63198811A (ja) | 1987-02-13 | 1987-02-13 | 微小変位量検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63198811A true JPS63198811A (ja) | 1988-08-17 |
| JPH0511884B2 JPH0511884B2 (enrdf_load_stackoverflow) | 1993-02-16 |
Family
ID=12323467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3115287A Granted JPS63198811A (ja) | 1987-02-13 | 1987-02-13 | 微小変位量検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63198811A (enrdf_load_stackoverflow) |
-
1987
- 1987-02-13 JP JP3115287A patent/JPS63198811A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511884B2 (enrdf_load_stackoverflow) | 1993-02-16 |
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