JPS63197691U - - Google Patents

Info

Publication number
JPS63197691U
JPS63197691U JP8933987U JP8933987U JPS63197691U JP S63197691 U JPS63197691 U JP S63197691U JP 8933987 U JP8933987 U JP 8933987U JP 8933987 U JP8933987 U JP 8933987U JP S63197691 U JPS63197691 U JP S63197691U
Authority
JP
Japan
Prior art keywords
workpiece
support member
cleaning
horizontal support
cleaning chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8933987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454871Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8933987U priority Critical patent/JPH0454871Y2/ja
Publication of JPS63197691U publication Critical patent/JPS63197691U/ja
Application granted granted Critical
Publication of JPH0454871Y2 publication Critical patent/JPH0454871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8933987U 1987-06-10 1987-06-10 Expired JPH0454871Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8933987U JPH0454871Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8933987U JPH0454871Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Publications (2)

Publication Number Publication Date
JPS63197691U true JPS63197691U (enrdf_load_stackoverflow) 1988-12-20
JPH0454871Y2 JPH0454871Y2 (enrdf_load_stackoverflow) 1992-12-22

Family

ID=30948242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8933987U Expired JPH0454871Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Country Status (1)

Country Link
JP (1) JPH0454871Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0454871Y2 (enrdf_load_stackoverflow) 1992-12-22

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