JPS63197652A - Ink jet recording head and its preparation - Google Patents

Ink jet recording head and its preparation

Info

Publication number
JPS63197652A
JPS63197652A JP2971487A JP2971487A JPS63197652A JP S63197652 A JPS63197652 A JP S63197652A JP 2971487 A JP2971487 A JP 2971487A JP 2971487 A JP2971487 A JP 2971487A JP S63197652 A JPS63197652 A JP S63197652A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
layer
substrate
flow passage
formed
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2971487A
Inventor
Hirokazu Komuro
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/14048Movable member in the chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1629Production of nozzles manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1631Production of nozzles manufacturing processes photolithography

Abstract

PURPOSE:To facilitate the formation of a fine valve and that of a fine flow passage and to solve the limit of the miniaturization or multiplication of an ink jet recording head as observed in a conventional example, by forming an integrally formed valve by utilizing a part of a substrate in a flow passage. CONSTITUTION:With due regard to the formation of a valve or durability as a substrate, for example, the substrate 1 consisting of a SiO2 layer 3, a polysilicon layer 4 and a SiO2 layer 5 is used on a silicon wafer 2. Next, a heat generator 6 composed of HfB2 and an electrode 14 are formed on the substrate 1. Subsequently, a heat generator and the SiO2 layer 7 becoming the protective layer of the electrode are formed in a thickness of about 2mum by a sputtering method. The formed SiO2 layer 7 and SiO2 layer 5 are treated with a photolithographic technique to form SiO2 patterns 15 on the polysilicon layer 4. By itching the polysilicon layer 4 by immersing the same in an etching liquid, the SiO2 layer 5 being a part of the layer constitution of the substrate is utilized to obtain a valve 8. A part 16 of the flow passage communicating with a liquid chamber is simultaneously formed. After a flow passage wall 10 is formed on a substrate 1, the cover plate 9 of the flow passage is laminated to form a flow passage 12 to complete a recording head.
JP2971487A 1987-02-13 1987-02-13 Ink jet recording head and its preparation Pending JPS63197652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2971487A JPS63197652A (en) 1987-02-13 1987-02-13 Ink jet recording head and its preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2971487A JPS63197652A (en) 1987-02-13 1987-02-13 Ink jet recording head and its preparation

Publications (1)

Publication Number Publication Date
JPS63197652A true true JPS63197652A (en) 1988-08-16

Family

ID=12283776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2971487A Pending JPS63197652A (en) 1987-02-13 1987-02-13 Ink jet recording head and its preparation

Country Status (1)

Country Link
JP (1) JPS63197652A (en)

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375326A (en) * 1992-02-06 1994-12-27 Seiko Epson Corporation Method of manufacturing ink jet head
EP0665106A2 (en) * 1994-01-31 1995-08-02 Neopost Limited Ink jet printing machine
US5821962A (en) * 1995-06-02 1998-10-13 Canon Kabushiki Kaisha Liquid ejection apparatus and method
EP0895861A1 (en) * 1997-08-05 1999-02-10 Canon Kabushiki Kaisha A liquid discharge head, a substrate for use of such head and a method of manufacture therefor
US5992984A (en) * 1996-07-09 1999-11-30 Canon Kabushiki Kaisha Liquid discharging head, head cartridge and liquid discharge apparatus
US6007187A (en) * 1995-04-26 1999-12-28 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
EP0920995A3 (en) * 1997-12-05 2000-02-23 Canon Kabushiki Kaisha Method of producing ink jet head valve, method of producing ink jet head and ink jet head produced by the method
US6062680A (en) * 1995-09-22 2000-05-16 Canon Kabushiki Kaisha Liquid ejection head and apparatus and liquid ejection method
US6074543A (en) * 1995-04-14 2000-06-13 Canon Kabushiki Kaisha Method for producing liquid ejecting head
US6095640A (en) * 1997-12-05 2000-08-01 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method, head cartridge and liquid discharge device
US6102529A (en) * 1995-04-26 2000-08-15 Canon Kabushiki Kaisha Liquid ejecting method with movable member
US6109735A (en) * 1996-06-07 2000-08-29 Canon Kabushiki Kaisha Liquid discharging method, liquid supplying method, liquid discharge head, liquid discharge head cartridge using such liquid discharge head, and liquid discharge apparatus
US6151049A (en) * 1996-07-12 2000-11-21 Canon Kabushiki Kaisha Liquid discharge head, recovery method and manufacturing method for liquid discharge head, and liquid discharge apparatus using liquid discharge head
US6154237A (en) * 1995-12-05 2000-11-28 Canon Kabushiki Kaisha Liquid ejecting method, liquid ejecting head and liquid ejecting apparatus in which motion of a movable member is controlled
US6164763A (en) * 1996-07-05 2000-12-26 Canon Kabushiki Kaisha Liquid discharging head with a movable member opposing a heater surface
US6183068B1 (en) 1996-07-12 2001-02-06 Canon Kabushiki Kaisha Liquid discharging head, head cartridge, liquid discharging device, recording system, head kit, and fabrication process of liquid discharging head
US6206508B1 (en) 1995-09-04 2001-03-27 Canon Kabushiki Kaisha Liquid ejecting method, liquid ejecting head, and head cartridge using same
US6213592B1 (en) 1996-06-07 2001-04-10 Canon Kabushiki Kaisha Method for discharging ink from a liquid jet recording head having a fluid resistance element with a movable member, and head, head cartridge and recording apparatus using that method
US6270199B1 (en) 1995-04-14 2001-08-07 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6305789B1 (en) 1995-01-13 2001-10-23 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6312111B1 (en) 1995-01-13 2001-11-06 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6331050B1 (en) 1995-04-14 2001-12-18 Canon Kabushiki Kaisha Liquid ejecting head and method in which a movable member is provided between flow paths, one path joining a common chamber and ejection orifice, the other, having a heat generating element
US6334669B1 (en) 1995-01-13 2002-01-01 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
JP2002254647A (en) * 2001-03-02 2002-09-11 Canon Inc Liquid jet head, liquid jet method, and manufacturing method for liquid jet head
US6457816B1 (en) 1996-07-12 2002-10-01 Canon Kabushiki Kaisha Liquid discharging method and a liquid jet head, and a head cartridge using such jet head, and a liquid jet apparatus
US6464345B2 (en) 2000-02-15 2002-10-15 Canon Kabushiki Kaisha Liquid discharging head, apparatus and method employing controlled bubble growth, and method of manufacturing the head
US6497475B1 (en) 1999-09-03 2002-12-24 Canon Kabushiki Kaisha Liquid discharge method, head, and apparatus which suppress bubble growth at the upstream side
US6533400B1 (en) 1999-09-03 2003-03-18 Canon Kabushiki Kaisha Liquid discharging method
US6554383B2 (en) 1996-07-12 2003-04-29 Canon Kabushiki Kaisha Liquid ejecting head and head cartridge capable of adjusting energy supplied thereto, liquid ejecting device provided with the head and head cartridge, and recording system
US6595625B2 (en) 1996-07-12 2003-07-22 Canon Kabushiki Kaisha Liquid discharging method accompanied by the displacement of a movable member, a liquid jet head for implementing such method, and a liquid jet apparatus for the implementation thereof
US6663230B2 (en) 1995-09-22 2003-12-16 Canon Kabushiki Kaisha Liquid ejection head, apparatus and recovery method for them
US6662448B2 (en) * 1998-10-15 2003-12-16 Xerox Corporation Method of fabricating a micro-electro-mechanical fluid ejector
US6676844B2 (en) * 2000-12-18 2004-01-13 Samsung Electronics Co. Ltd. Method for manufacturing ink-jet printhead having hemispherical ink chamber
US6709090B2 (en) 1995-09-22 2004-03-23 Canon Kabushiki Kaisha Liquid ejection method and liquid ejection head therefor
US6773092B1 (en) 1996-07-05 2004-08-10 Aya Yoshihira Liquid discharging head and liquid discharging device
US7434916B2 (en) 2006-03-03 2008-10-14 Canon Finetech Inc. Liquid ejection head
US7665826B2 (en) 2006-03-03 2010-02-23 Canon Finetech Inc. Inkjet printing head and method of manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119372A (en) * 1984-07-07 1986-01-28 Nec Corp Ink jet head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119372A (en) * 1984-07-07 1986-01-28 Nec Corp Ink jet head

Cited By (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375326A (en) * 1992-02-06 1994-12-27 Seiko Epson Corporation Method of manufacturing ink jet head
EP0665106A2 (en) * 1994-01-31 1995-08-02 Neopost Limited Ink jet printing machine
EP0665106A3 (en) * 1994-01-31 1996-05-29 Neopost Ltd Ink jet printing machine.
US6312111B1 (en) 1995-01-13 2001-11-06 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6305789B1 (en) 1995-01-13 2001-10-23 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6595626B2 (en) 1995-01-13 2003-07-22 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6652076B2 (en) 1995-01-13 2003-11-25 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6435669B1 (en) 1995-01-13 2002-08-20 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6334669B1 (en) 1995-01-13 2002-01-01 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6074543A (en) * 1995-04-14 2000-06-13 Canon Kabushiki Kaisha Method for producing liquid ejecting head
US6378205B1 (en) 1995-04-14 2002-04-30 Canon Kabushiki Kaisha Method for producing liquid ejecting head and liquid ejecting head obtained by the same method
US6270199B1 (en) 1995-04-14 2001-08-07 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US6331050B1 (en) 1995-04-14 2001-12-18 Canon Kabushiki Kaisha Liquid ejecting head and method in which a movable member is provided between flow paths, one path joining a common chamber and ejection orifice, the other, having a heat generating element
US6293656B1 (en) 1995-04-26 2001-09-25 Canon Kabushiki Kaisha Liquid ejecting method with movable member
US6102529A (en) * 1995-04-26 2000-08-15 Canon Kabushiki Kaisha Liquid ejecting method with movable member
US6174050B1 (en) 1995-04-26 2001-01-16 Canon Kabushiki Kaisha Liquid ejection head with a heat generating surface that is substantially flush and/or smoothly continuous with a surface upstream thereto
US6007187A (en) * 1995-04-26 1999-12-28 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
US5821962A (en) * 1995-06-02 1998-10-13 Canon Kabushiki Kaisha Liquid ejection apparatus and method
US6206508B1 (en) 1995-09-04 2001-03-27 Canon Kabushiki Kaisha Liquid ejecting method, liquid ejecting head, and head cartridge using same
US6709090B2 (en) 1995-09-22 2004-03-23 Canon Kabushiki Kaisha Liquid ejection method and liquid ejection head therefor
US6851779B2 (en) 1995-09-22 2005-02-08 Canon Kabushiki Kaisha Liquid ejection method and liquid ejection head therefor
US6062680A (en) * 1995-09-22 2000-05-16 Canon Kabushiki Kaisha Liquid ejection head and apparatus and liquid ejection method
US6663230B2 (en) 1995-09-22 2003-12-16 Canon Kabushiki Kaisha Liquid ejection head, apparatus and recovery method for them
US6154237A (en) * 1995-12-05 2000-11-28 Canon Kabushiki Kaisha Liquid ejecting method, liquid ejecting head and liquid ejecting apparatus in which motion of a movable member is controlled
US6109735A (en) * 1996-06-07 2000-08-29 Canon Kabushiki Kaisha Liquid discharging method, liquid supplying method, liquid discharge head, liquid discharge head cartridge using such liquid discharge head, and liquid discharge apparatus
US6213592B1 (en) 1996-06-07 2001-04-10 Canon Kabushiki Kaisha Method for discharging ink from a liquid jet recording head having a fluid resistance element with a movable member, and head, head cartridge and recording apparatus using that method
US6164763A (en) * 1996-07-05 2000-12-26 Canon Kabushiki Kaisha Liquid discharging head with a movable member opposing a heater surface
US6773092B1 (en) 1996-07-05 2004-08-10 Aya Yoshihira Liquid discharging head and liquid discharging device
US5992984A (en) * 1996-07-09 1999-11-30 Canon Kabushiki Kaisha Liquid discharging head, head cartridge and liquid discharge apparatus
US6264302B1 (en) 1996-07-09 2001-07-24 Canon Kabushiki Kaisha Detection of a discharge state of ink in an ink discharge recording head
US6554383B2 (en) 1996-07-12 2003-04-29 Canon Kabushiki Kaisha Liquid ejecting head and head cartridge capable of adjusting energy supplied thereto, liquid ejecting device provided with the head and head cartridge, and recording system
US6183068B1 (en) 1996-07-12 2001-02-06 Canon Kabushiki Kaisha Liquid discharging head, head cartridge, liquid discharging device, recording system, head kit, and fabrication process of liquid discharging head
US6595625B2 (en) 1996-07-12 2003-07-22 Canon Kabushiki Kaisha Liquid discharging method accompanied by the displacement of a movable member, a liquid jet head for implementing such method, and a liquid jet apparatus for the implementation thereof
US6457816B1 (en) 1996-07-12 2002-10-01 Canon Kabushiki Kaisha Liquid discharging method and a liquid jet head, and a head cartridge using such jet head, and a liquid jet apparatus
US6151049A (en) * 1996-07-12 2000-11-21 Canon Kabushiki Kaisha Liquid discharge head, recovery method and manufacturing method for liquid discharge head, and liquid discharge apparatus using liquid discharge head
US6374482B1 (en) 1997-08-05 2002-04-23 Canon Kabushiki Kaisha Method of manufacturing a liquid discharge head
EP0895861A1 (en) * 1997-08-05 1999-02-10 Canon Kabushiki Kaisha A liquid discharge head, a substrate for use of such head and a method of manufacture therefor
US6277294B1 (en) 1997-12-05 2001-08-21 Canon Kabushiki Kaisha Method of producing ink jet head valve, method of producing ink jet head and ink jet head produced by the method
EP0920995A3 (en) * 1997-12-05 2000-02-23 Canon Kabushiki Kaisha Method of producing ink jet head valve, method of producing ink jet head and ink jet head produced by the method
US6439700B1 (en) 1997-12-05 2002-08-27 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method, head cartridge and liquid discharge device
US6095640A (en) * 1997-12-05 2000-08-01 Canon Kabushiki Kaisha Liquid discharge head, liquid discharge method, head cartridge and liquid discharge device
US6662448B2 (en) * 1998-10-15 2003-12-16 Xerox Corporation Method of fabricating a micro-electro-mechanical fluid ejector
US6533400B1 (en) 1999-09-03 2003-03-18 Canon Kabushiki Kaisha Liquid discharging method
US6945635B2 (en) 1999-09-03 2005-09-20 Canon Kabushiki Kaisha Liquid discharge method, liquid discharge head, liquid discharge apparatus, and method for manufacturing liquid discharge head
US6854831B2 (en) 1999-09-03 2005-02-15 Canon Kabushiki Kaisha Liquid discharge method, liquid discharge head, liquid discharge apparatus, and method for manufacturing liquid discharge head
US6497475B1 (en) 1999-09-03 2002-12-24 Canon Kabushiki Kaisha Liquid discharge method, head, and apparatus which suppress bubble growth at the upstream side
US6464345B2 (en) 2000-02-15 2002-10-15 Canon Kabushiki Kaisha Liquid discharging head, apparatus and method employing controlled bubble growth, and method of manufacturing the head
US6676844B2 (en) * 2000-12-18 2004-01-13 Samsung Electronics Co. Ltd. Method for manufacturing ink-jet printhead having hemispherical ink chamber
JP4708586B2 (en) * 2001-03-02 2011-06-22 キヤノン株式会社 A liquid discharge head, a liquid ejecting method, and a manufacturing method of the liquid discharge head
JP2002254647A (en) * 2001-03-02 2002-09-11 Canon Inc Liquid jet head, liquid jet method, and manufacturing method for liquid jet head
US7434916B2 (en) 2006-03-03 2008-10-14 Canon Finetech Inc. Liquid ejection head
US7665826B2 (en) 2006-03-03 2010-02-23 Canon Finetech Inc. Inkjet printing head and method of manufacturing the same

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