JPS63197026U - - Google Patents
Info
- Publication number
- JPS63197026U JPS63197026U JP8945487U JP8945487U JPS63197026U JP S63197026 U JPS63197026 U JP S63197026U JP 8945487 U JP8945487 U JP 8945487U JP 8945487 U JP8945487 U JP 8945487U JP S63197026 U JPS63197026 U JP S63197026U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- air
- passage
- supply passage
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Automatic Assembly (AREA)
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987089454U JPH0618748Y2 (ja) | 1987-06-09 | 1987-06-09 | 真空式吸着装置における吸着検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987089454U JPH0618748Y2 (ja) | 1987-06-09 | 1987-06-09 | 真空式吸着装置における吸着検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63197026U true JPS63197026U (pl) | 1988-12-19 |
| JPH0618748Y2 JPH0618748Y2 (ja) | 1994-05-18 |
Family
ID=30948452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987089454U Expired - Lifetime JPH0618748Y2 (ja) | 1987-06-09 | 1987-06-09 | 真空式吸着装置における吸着検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0618748Y2 (pl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (ja) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | ビーズ移送装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812684U (pl) * | 1971-06-19 | 1973-02-12 |
-
1987
- 1987-06-09 JP JP1987089454U patent/JPH0618748Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812684U (pl) * | 1971-06-19 | 1973-02-12 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (ja) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | ビーズ移送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0618748Y2 (ja) | 1994-05-18 |