JPS63195733U - - Google Patents
Info
- Publication number
- JPS63195733U JPS63195733U JP6970987U JP6970987U JPS63195733U JP S63195733 U JPS63195733 U JP S63195733U JP 6970987 U JP6970987 U JP 6970987U JP 6970987 U JP6970987 U JP 6970987U JP S63195733 U JPS63195733 U JP S63195733U
- Authority
- JP
- Japan
- Prior art keywords
- link
- sensor
- wafer
- side wall
- storage means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6970987U JPH0610688Y2 (ja) | 1987-05-12 | 1987-05-12 | ウエハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6970987U JPH0610688Y2 (ja) | 1987-05-12 | 1987-05-12 | ウエハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63195733U true JPS63195733U (enExample) | 1988-12-16 |
| JPH0610688Y2 JPH0610688Y2 (ja) | 1994-03-16 |
Family
ID=30910691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6970987U Expired - Lifetime JPH0610688Y2 (ja) | 1987-05-12 | 1987-05-12 | ウエハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610688Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001144038A (ja) * | 1999-11-16 | 2001-05-25 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
-
1987
- 1987-05-12 JP JP6970987U patent/JPH0610688Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001144038A (ja) * | 1999-11-16 | 2001-05-25 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610688Y2 (ja) | 1994-03-16 |