JPS6319572U - - Google Patents
Info
- Publication number
- JPS6319572U JPS6319572U JP11369986U JP11369986U JPS6319572U JP S6319572 U JPS6319572 U JP S6319572U JP 11369986 U JP11369986 U JP 11369986U JP 11369986 U JP11369986 U JP 11369986U JP S6319572 U JPS6319572 U JP S6319572U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- rotating shaft
- rotating plate
- high frequency
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11369986U JPH0248427Y2 (enExample) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11369986U JPH0248427Y2 (enExample) | 1986-07-23 | 1986-07-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6319572U true JPS6319572U (enExample) | 1988-02-09 |
| JPH0248427Y2 JPH0248427Y2 (enExample) | 1990-12-19 |
Family
ID=30995753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11369986U Expired JPH0248427Y2 (enExample) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248427Y2 (enExample) |
-
1986
- 1986-07-23 JP JP11369986U patent/JPH0248427Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248427Y2 (enExample) | 1990-12-19 |
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