JPS6319572U - - Google Patents

Info

Publication number
JPS6319572U
JPS6319572U JP11369986U JP11369986U JPS6319572U JP S6319572 U JPS6319572 U JP S6319572U JP 11369986 U JP11369986 U JP 11369986U JP 11369986 U JP11369986 U JP 11369986U JP S6319572 U JPS6319572 U JP S6319572U
Authority
JP
Japan
Prior art keywords
reaction tube
rotating shaft
rotating plate
high frequency
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11369986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248427Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11369986U priority Critical patent/JPH0248427Y2/ja
Publication of JPS6319572U publication Critical patent/JPS6319572U/ja
Application granted granted Critical
Publication of JPH0248427Y2 publication Critical patent/JPH0248427Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP11369986U 1986-07-23 1986-07-23 Expired JPH0248427Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11369986U JPH0248427Y2 (enrdf_load_stackoverflow) 1986-07-23 1986-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11369986U JPH0248427Y2 (enrdf_load_stackoverflow) 1986-07-23 1986-07-23

Publications (2)

Publication Number Publication Date
JPS6319572U true JPS6319572U (enrdf_load_stackoverflow) 1988-02-09
JPH0248427Y2 JPH0248427Y2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=30995753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11369986U Expired JPH0248427Y2 (enrdf_load_stackoverflow) 1986-07-23 1986-07-23

Country Status (1)

Country Link
JP (1) JPH0248427Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0248427Y2 (enrdf_load_stackoverflow) 1990-12-19

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