JPS6319564U - - Google Patents

Info

Publication number
JPS6319564U
JPS6319564U JP11021886U JP11021886U JPS6319564U JP S6319564 U JPS6319564 U JP S6319564U JP 11021886 U JP11021886 U JP 11021886U JP 11021886 U JP11021886 U JP 11021886U JP S6319564 U JPS6319564 U JP S6319564U
Authority
JP
Japan
Prior art keywords
electrode
cathode
housing
plate
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11021886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311226Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11021886U priority Critical patent/JPH0311226Y2/ja
Publication of JPS6319564U publication Critical patent/JPS6319564U/ja
Application granted granted Critical
Publication of JPH0311226Y2 publication Critical patent/JPH0311226Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11021886U 1986-07-18 1986-07-18 Expired JPH0311226Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11021886U JPH0311226Y2 (enrdf_load_stackoverflow) 1986-07-18 1986-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11021886U JPH0311226Y2 (enrdf_load_stackoverflow) 1986-07-18 1986-07-18

Publications (2)

Publication Number Publication Date
JPS6319564U true JPS6319564U (enrdf_load_stackoverflow) 1988-02-09
JPH0311226Y2 JPH0311226Y2 (enrdf_load_stackoverflow) 1991-03-19

Family

ID=30989037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11021886U Expired JPH0311226Y2 (enrdf_load_stackoverflow) 1986-07-18 1986-07-18

Country Status (1)

Country Link
JP (1) JPH0311226Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0311226Y2 (enrdf_load_stackoverflow) 1991-03-19

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