JPS63195572U - - Google Patents

Info

Publication number
JPS63195572U
JPS63195572U JP8601387U JP8601387U JPS63195572U JP S63195572 U JPS63195572 U JP S63195572U JP 8601387 U JP8601387 U JP 8601387U JP 8601387 U JP8601387 U JP 8601387U JP S63195572 U JPS63195572 U JP S63195572U
Authority
JP
Japan
Prior art keywords
gas supply
furnace
units
supply unit
semiconductor substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8601387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8601387U priority Critical patent/JPS63195572U/ja
Publication of JPS63195572U publication Critical patent/JPS63195572U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8601387U 1987-06-02 1987-06-02 Pending JPS63195572U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8601387U JPS63195572U (enrdf_load_stackoverflow) 1987-06-02 1987-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8601387U JPS63195572U (enrdf_load_stackoverflow) 1987-06-02 1987-06-02

Publications (1)

Publication Number Publication Date
JPS63195572U true JPS63195572U (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30941936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8601387U Pending JPS63195572U (enrdf_load_stackoverflow) 1987-06-02 1987-06-02

Country Status (1)

Country Link
JP (1) JPS63195572U (enrdf_load_stackoverflow)

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