JPS61190137U - - Google Patents

Info

Publication number
JPS61190137U
JPS61190137U JP7559285U JP7559285U JPS61190137U JP S61190137 U JPS61190137 U JP S61190137U JP 7559285 U JP7559285 U JP 7559285U JP 7559285 U JP7559285 U JP 7559285U JP S61190137 U JPS61190137 U JP S61190137U
Authority
JP
Japan
Prior art keywords
plasma processing
chamber doors
processing apparatus
machine head
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7559285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7559285U priority Critical patent/JPS61190137U/ja
Publication of JPS61190137U publication Critical patent/JPS61190137U/ja
Pending legal-status Critical Current

Links

JP7559285U 1985-05-21 1985-05-21 Pending JPS61190137U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7559285U JPS61190137U (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7559285U JPS61190137U (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Publications (1)

Publication Number Publication Date
JPS61190137U true JPS61190137U (enrdf_load_stackoverflow) 1986-11-27

Family

ID=30616954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7559285U Pending JPS61190137U (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPS61190137U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152251A (ja) * 1988-12-03 1990-06-12 Furendotetsuku Kenkyusho:Kk 縦型半導体製造システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152251A (ja) * 1988-12-03 1990-06-12 Furendotetsuku Kenkyusho:Kk 縦型半導体製造システム

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