JPS63195333U - - Google Patents

Info

Publication number
JPS63195333U
JPS63195333U JP8334987U JP8334987U JPS63195333U JP S63195333 U JPS63195333 U JP S63195333U JP 8334987 U JP8334987 U JP 8334987U JP 8334987 U JP8334987 U JP 8334987U JP S63195333 U JPS63195333 U JP S63195333U
Authority
JP
Japan
Prior art keywords
rollers
resist
substrate
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8334987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8334987U priority Critical patent/JPS63195333U/ja
Publication of JPS63195333U publication Critical patent/JPS63195333U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す斜視図、第２
図は同側面図、第３図は本考案の他の実施例を示
す側面図、第４図は従来例を示す側面図、第５図
は縦搬送式の一例を説明する斜視図である。 １……デイスペンサー、２……レジスト、３…
…ローラ、３ａ……回転軸、４……基板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 回転軸を水平方向にしてローラを配置するとと
    もに、該ローラによりレジストが塗布される基板
    の搬送方向をローラの上下方向にしてなることを
    特徴とするレジスト塗布用ロールコーター。
JP8334987U 1987-05-29 1987-05-29 Pending JPS63195333U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8334987U JPS63195333U (ja) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8334987U JPS63195333U (ja) 1987-05-29 1987-05-29

Publications (1)

Publication Number Publication Date
JPS63195333U true JPS63195333U (ja) 1988-12-15

Family

ID=30936855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8334987U Pending JPS63195333U (ja) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPS63195333U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50121338A (ja) * 1974-03-12 1975-09-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50121338A (ja) * 1974-03-12 1975-09-23

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