JPS63195170U - - Google Patents

Info

Publication number
JPS63195170U
JPS63195170U JP8690387U JP8690387U JPS63195170U JP S63195170 U JPS63195170 U JP S63195170U JP 8690387 U JP8690387 U JP 8690387U JP 8690387 U JP8690387 U JP 8690387U JP S63195170 U JPS63195170 U JP S63195170U
Authority
JP
Japan
Prior art keywords
valve
amount
proportional control
position sensor
valve rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8690387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8690387U priority Critical patent/JPS63195170U/ja
Publication of JPS63195170U publication Critical patent/JPS63195170U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Magnetically Actuated Valves (AREA)
JP8690387U 1987-06-04 1987-06-04 Pending JPS63195170U (US07321065-20080122-C00020.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8690387U JPS63195170U (US07321065-20080122-C00020.png) 1987-06-04 1987-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8690387U JPS63195170U (US07321065-20080122-C00020.png) 1987-06-04 1987-06-04

Publications (1)

Publication Number Publication Date
JPS63195170U true JPS63195170U (US07321065-20080122-C00020.png) 1988-12-15

Family

ID=30943639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8690387U Pending JPS63195170U (US07321065-20080122-C00020.png) 1987-06-04 1987-06-04

Country Status (1)

Country Link
JP (1) JPS63195170U (US07321065-20080122-C00020.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267040A (ja) * 2001-03-09 2002-09-18 Smc Corp 流体圧力制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694206A (en) * 1979-12-28 1981-07-30 Fujitsu Ltd Position detecting device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694206A (en) * 1979-12-28 1981-07-30 Fujitsu Ltd Position detecting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267040A (ja) * 2001-03-09 2002-09-18 Smc Corp 流体圧力制御装置
JP4702657B2 (ja) * 2001-03-09 2011-06-15 Smc株式会社 流体圧力制御装置

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