JPS63194835U - - Google Patents

Info

Publication number
JPS63194835U
JPS63194835U JP8762387U JP8762387U JPS63194835U JP S63194835 U JPS63194835 U JP S63194835U JP 8762387 U JP8762387 U JP 8762387U JP 8762387 U JP8762387 U JP 8762387U JP S63194835 U JPS63194835 U JP S63194835U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
boat
cassette
rolling
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8762387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8762387U priority Critical patent/JPS63194835U/ja
Publication of JPS63194835U publication Critical patent/JPS63194835U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP8762387U 1987-06-05 1987-06-05 Pending JPS63194835U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8762387U JPS63194835U (US20020051482A1-20020502-M00012.png) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8762387U JPS63194835U (US20020051482A1-20020502-M00012.png) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63194835U true JPS63194835U (US20020051482A1-20020502-M00012.png) 1988-12-15

Family

ID=30945001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8762387U Pending JPS63194835U (US20020051482A1-20020502-M00012.png) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63194835U (US20020051482A1-20020502-M00012.png)

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