JPS63194241U - - Google Patents

Info

Publication number
JPS63194241U
JPS63194241U JP8406287U JP8406287U JPS63194241U JP S63194241 U JPS63194241 U JP S63194241U JP 8406287 U JP8406287 U JP 8406287U JP 8406287 U JP8406287 U JP 8406287U JP S63194241 U JPS63194241 U JP S63194241U
Authority
JP
Japan
Prior art keywords
blowing
fixed
blow
support
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8406287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444989Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8406287U priority Critical patent/JPH0444989Y2/ja
Publication of JPS63194241U publication Critical patent/JPS63194241U/ja
Application granted granted Critical
Publication of JPH0444989Y2 publication Critical patent/JPH0444989Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Duct Arrangements (AREA)
JP8406287U 1987-05-30 1987-05-30 Expired JPH0444989Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8406287U JPH0444989Y2 (https=) 1987-05-30 1987-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8406287U JPH0444989Y2 (https=) 1987-05-30 1987-05-30

Publications (2)

Publication Number Publication Date
JPS63194241U true JPS63194241U (https=) 1988-12-14
JPH0444989Y2 JPH0444989Y2 (https=) 1992-10-22

Family

ID=30938220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8406287U Expired JPH0444989Y2 (https=) 1987-05-30 1987-05-30

Country Status (1)

Country Link
JP (1) JPH0444989Y2 (https=)

Also Published As

Publication number Publication date
JPH0444989Y2 (https=) 1992-10-22

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