JPS63194241U - - Google Patents

Info

Publication number
JPS63194241U
JPS63194241U JP8406287U JP8406287U JPS63194241U JP S63194241 U JPS63194241 U JP S63194241U JP 8406287 U JP8406287 U JP 8406287U JP 8406287 U JP8406287 U JP 8406287U JP S63194241 U JPS63194241 U JP S63194241U
Authority
JP
Japan
Prior art keywords
blowing
fixed
blow
support
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8406287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444989Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8406287U priority Critical patent/JPH0444989Y2/ja
Publication of JPS63194241U publication Critical patent/JPS63194241U/ja
Application granted granted Critical
Publication of JPH0444989Y2 publication Critical patent/JPH0444989Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Duct Arrangements (AREA)
JP8406287U 1987-05-30 1987-05-30 Expired JPH0444989Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8406287U JPH0444989Y2 (cs) 1987-05-30 1987-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8406287U JPH0444989Y2 (cs) 1987-05-30 1987-05-30

Publications (2)

Publication Number Publication Date
JPS63194241U true JPS63194241U (cs) 1988-12-14
JPH0444989Y2 JPH0444989Y2 (cs) 1992-10-22

Family

ID=30938220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8406287U Expired JPH0444989Y2 (cs) 1987-05-30 1987-05-30

Country Status (1)

Country Link
JP (1) JPH0444989Y2 (cs)

Also Published As

Publication number Publication date
JPH0444989Y2 (cs) 1992-10-22

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