JPS63193841U - - Google Patents
Info
- Publication number
- JPS63193841U JPS63193841U JP8215787U JP8215787U JPS63193841U JP S63193841 U JPS63193841 U JP S63193841U JP 8215787 U JP8215787 U JP 8215787U JP 8215787 U JP8215787 U JP 8215787U JP S63193841 U JPS63193841 U JP S63193841U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- actuator
- micro switch
- placement
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8215787U JPS63193841U (en18) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8215787U JPS63193841U (en18) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193841U true JPS63193841U (en18) | 1988-12-14 |
Family
ID=30934551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8215787U Pending JPS63193841U (en18) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193841U (en18) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015032702A (ja) * | 2013-08-02 | 2015-02-16 | 光洋サーモシステム株式会社 | ウェハ搬送用装置 |
| JP2017147473A (ja) * | 2017-06-05 | 2017-08-24 | 光洋サーモシステム株式会社 | ウェハ搬送用装置 |
-
1987
- 1987-05-30 JP JP8215787U patent/JPS63193841U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015032702A (ja) * | 2013-08-02 | 2015-02-16 | 光洋サーモシステム株式会社 | ウェハ搬送用装置 |
| JP2017147473A (ja) * | 2017-06-05 | 2017-08-24 | 光洋サーモシステム株式会社 | ウェハ搬送用装置 |