JPS63193841U - - Google Patents
Info
- Publication number
- JPS63193841U JPS63193841U JP8215787U JP8215787U JPS63193841U JP S63193841 U JPS63193841 U JP S63193841U JP 8215787 U JP8215787 U JP 8215787U JP 8215787 U JP8215787 U JP 8215787U JP S63193841 U JPS63193841 U JP S63193841U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- actuator
- micro switch
- placement
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の実施例に係る載置検出装置に
供されるスイツチング機構を示す分解斜視図、第
２図はスイツチング機構を載置台上に設置して、
ヘツド板上にウエハキヤリアを載置した状態を示
す要部断面図、第３図はウエハキヤリアの形状の
一例を示す斜視図である。
１……基板、５……アクチユエータ、９……ヘ
ツド板、１４……マイクロスイツチ、１９……載
置台、２０……ウエハキヤリア。
FIG. 1 is an exploded perspective view showing a switching mechanism provided for a placement detection device according to an embodiment of the present invention, and FIG. 2 shows a switching mechanism installed on a mounting table,
FIG. 3 is a sectional view of a main part showing a state in which a wafer carrier is placed on a head plate, and a perspective view showing an example of the shape of the wafer carrier. DESCRIPTION OF SYMBOLS 1... Substrate, 5... Actuator, 9... Head plate, 14... Micro switch, 19... Mounting table, 20... Wafer carrier.
Claims (1)
可能にアクチユエータを設け、このアクチユエー
タを回動させて、マイクロスイツチをオン・オフ
するように構成したことを特徴とするウエハキヤ
リアの載置検出装置。 Detection of placement of a wafer carrier, characterized in that an actuator is rotatably provided at a contact position with the wafer carrier to be placed, and the actuator is rotated to turn on and off a micro switch. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8215787U JPS63193841U (en) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8215787U JPS63193841U (en) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193841U true JPS63193841U (en) | 1988-12-14 |
Family
ID=30934551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8215787U Pending JPS63193841U (en) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193841U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015032702A (en) * | 2013-08-02 | 2015-02-16 | 光洋サーモシステム株式会社 | Wafer transfer device |
| JP2017147473A (en) * | 2017-06-05 | 2017-08-24 | 光洋サーモシステム株式会社 | Wafer transfer device |
-
1987
- 1987-05-30 JP JP8215787U patent/JPS63193841U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015032702A (en) * | 2013-08-02 | 2015-02-16 | 光洋サーモシステム株式会社 | Wafer transfer device |
| JP2017147473A (en) * | 2017-06-05 | 2017-08-24 | 光洋サーモシステム株式会社 | Wafer transfer device |