JPS63193672U - - Google Patents
Info
- Publication number
- JPS63193672U JPS63193672U JP7825188U JP7825188U JPS63193672U JP S63193672 U JPS63193672 U JP S63193672U JP 7825188 U JP7825188 U JP 7825188U JP 7825188 U JP7825188 U JP 7825188U JP S63193672 U JPS63193672 U JP S63193672U
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- vertical
- horizontal
- chamber
- clean bench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 8
- 238000007664 blowing Methods 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 2
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7825188U JPS63193672U (cs) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7825188U JPS63193672U (cs) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193672U true JPS63193672U (cs) | 1988-12-13 |
Family
ID=30927018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7825188U Pending JPS63193672U (cs) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193672U (cs) |
-
1988
- 1988-06-15 JP JP7825188U patent/JPS63193672U/ja active Pending