JPS63193573U - - Google Patents
Info
- Publication number
- JPS63193573U JPS63193573U JP8314487U JP8314487U JPS63193573U JP S63193573 U JPS63193573 U JP S63193573U JP 8314487 U JP8314487 U JP 8314487U JP 8314487 U JP8314487 U JP 8314487U JP S63193573 U JPS63193573 U JP S63193573U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- degrees
- angle
- liquid substance
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314487U JPS63193573U (tr) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314487U JPS63193573U (tr) | 1987-05-29 | 1987-05-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63193573U true JPS63193573U (tr) | 1988-12-13 |
Family
ID=30936465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8314487U Pending JPS63193573U (tr) | 1987-05-29 | 1987-05-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63193573U (tr) |
-
1987
- 1987-05-29 JP JP8314487U patent/JPS63193573U/ja active Pending
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