JPS63193452A - 二次イオン質量分析計 - Google Patents

二次イオン質量分析計

Info

Publication number
JPS63193452A
JPS63193452A JP62025832A JP2583287A JPS63193452A JP S63193452 A JPS63193452 A JP S63193452A JP 62025832 A JP62025832 A JP 62025832A JP 2583287 A JP2583287 A JP 2583287A JP S63193452 A JPS63193452 A JP S63193452A
Authority
JP
Japan
Prior art keywords
ions
counting
secondary ion
mesh
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62025832A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587935B2 (https=
Inventor
Yasubumi Kameshima
亀島　泰文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62025832A priority Critical patent/JPS63193452A/ja
Publication of JPS63193452A publication Critical patent/JPS63193452A/ja
Publication of JPH0587935B2 publication Critical patent/JPH0587935B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP62025832A 1987-02-05 1987-02-05 二次イオン質量分析計 Granted JPS63193452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62025832A JPS63193452A (ja) 1987-02-05 1987-02-05 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62025832A JPS63193452A (ja) 1987-02-05 1987-02-05 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS63193452A true JPS63193452A (ja) 1988-08-10
JPH0587935B2 JPH0587935B2 (https=) 1993-12-20

Family

ID=12176832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62025832A Granted JPS63193452A (ja) 1987-02-05 1987-02-05 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS63193452A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003509812A (ja) * 1999-09-03 2003-03-11 サーモ マスラボ リミテッド 高ダイナミックレンジ質量分析計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003509812A (ja) * 1999-09-03 2003-03-11 サーモ マスラボ リミテッド 高ダイナミックレンジ質量分析計
JP4869526B2 (ja) * 1999-09-03 2012-02-08 サーモ フィニガン リミテッド ライアビリティ カンパニー 高ダイナミックレンジ質量分析計

Also Published As

Publication number Publication date
JPH0587935B2 (https=) 1993-12-20

Similar Documents

Publication Publication Date Title
Fite et al. Collisions of electrons with hydrogen atoms. I. Ionization
Martoff et al. Suppressing drift chamber diffusion without magnetic field
Richter et al. Linearity tests for secondary electron multipliers used in isotope ratio mass spectrometry
Cottrell et al. Characteristics of a multichannel electrooptical detection system and its application to the analysis of large molecules by fast atom bombardment mass spectrometry
Kooser et al. Gas-phase endstation of electron, ion and coincidence spectroscopies for diluted samples at the FinEstBeAMS beamline of the MAX IV 1.5 GeV storage ring
CN102507623A (zh) 一种非扫描式波长色散型x射线荧光光谱仪
Barnes IV et al. Recent advances in detector-array technology for mass spectrometry
Stacey et al. A five-collector system for the simultaneous measurement of argon isotope ratios in a static mass spectrometer
JPS5917500B2 (ja) 中性粒子検出装置
CN108538699B (zh) 质谱-能谱一体化高层中性大气探测装置
JPH0836060A (ja) 真空内を流れる電荷量を測定するための方法及び装置，並びにこれを用いた質量スペクトロメータ
Sarvestani et al. Study and application of hole structures as gas gain devices for two dimensional high rate X-ray detectors
Vermeulen et al. A versatile detection system for a broad range magnetic spectrograph
Gruntman et al. H atom detection and energy analysis by use of thin foils and TOF technique
Ford Jr et al. A position sensitive proportional detector for a magnetic spectrograph
US20060151695A1 (en) Process and device for measuring ions
US5541409A (en) High resolution retarding potential analyzer
Hvelplund et al. Equilibrium charge distributions of light ions in helium, measured with a position-sensitive open electron multiplier
US3634754A (en) Method and apparatus for linearly measuring electron capture with an electron capture detector
JPS63193452A (ja) 二次イオン質量分析計
Stern et al. Ion chambers for fluorescence and laboratory EXAFS detection
US6593567B1 (en) Ion mobility spectrometer having extended linear dynamic range
Orunesajo et al. A multi-mass and multi-hit two-camera 3D ion momentum imaging system
Patra et al. Characteristic study of a quadruple GEM detector and its comparison with a triple GEM detector
US2456426A (en) Mass spectrometer system