JPS63193452A - 二次イオン質量分析計 - Google Patents
二次イオン質量分析計Info
- Publication number
- JPS63193452A JPS63193452A JP62025832A JP2583287A JPS63193452A JP S63193452 A JPS63193452 A JP S63193452A JP 62025832 A JP62025832 A JP 62025832A JP 2583287 A JP2583287 A JP 2583287A JP S63193452 A JPS63193452 A JP S63193452A
- Authority
- JP
- Japan
- Prior art keywords
- ions
- counting
- secondary ion
- mesh
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical group 0.000 claims abstract description 64
- 238000001514 detection method Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 abstract description 6
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 abstract description 4
- 229920006395 saturated elastomer Polymers 0.000 abstract description 3
- KLEAIHJJLUAXIQ-JDRGBKBRSA-N irinotecan hydrochloride hydrate Chemical compound O.O.O.Cl.C1=C2C(CC)=C3CN(C(C4=C([C@@](C(=O)OC4)(O)CC)C=4)=O)C=4C3=NC2=CC=C1OC(=O)N(CC1)CCC1N1CCCCC1 KLEAIHJJLUAXIQ-JDRGBKBRSA-N 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 oxygen ion Chemical class 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025832A JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025832A JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63193452A true JPS63193452A (ja) | 1988-08-10 |
| JPH0587935B2 JPH0587935B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-12-20 |
Family
ID=12176832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62025832A Granted JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193452A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003509812A (ja) * | 1999-09-03 | 2003-03-11 | サーモ マスラボ リミテッド | 高ダイナミックレンジ質量分析計 |
-
1987
- 1987-02-05 JP JP62025832A patent/JPS63193452A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003509812A (ja) * | 1999-09-03 | 2003-03-11 | サーモ マスラボ リミテッド | 高ダイナミックレンジ質量分析計 |
| JP4869526B2 (ja) * | 1999-09-03 | 2012-02-08 | サーモ フィニガン リミテッド ライアビリティ カンパニー | 高ダイナミックレンジ質量分析計 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0587935B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-12-20 |
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