JPS63193316U - - Google Patents

Info

Publication number
JPS63193316U
JPS63193316U JP8445287U JP8445287U JPS63193316U JP S63193316 U JPS63193316 U JP S63193316U JP 8445287 U JP8445287 U JP 8445287U JP 8445287 U JP8445287 U JP 8445287U JP S63193316 U JPS63193316 U JP S63193316U
Authority
JP
Japan
Prior art keywords
light
lens
receiving surface
path
displacement sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8445287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8445287U priority Critical patent/JPS63193316U/ja
Publication of JPS63193316U publication Critical patent/JPS63193316U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP8445287U 1987-05-29 1987-05-29 Pending JPS63193316U (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8445287U JPS63193316U (el) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8445287U JPS63193316U (el) 1987-05-29 1987-05-29

Publications (1)

Publication Number Publication Date
JPS63193316U true JPS63193316U (el) 1988-12-13

Family

ID=30938967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8445287U Pending JPS63193316U (el) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPS63193316U (el)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04329303A (ja) * 1991-04-30 1992-11-18 Dainippon Screen Mfg Co Ltd 光学測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04329303A (ja) * 1991-04-30 1992-11-18 Dainippon Screen Mfg Co Ltd 光学測定装置

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