JPS6319295U - - Google Patents

Info

Publication number
JPS6319295U
JPS6319295U JP11220786U JP11220786U JPS6319295U JP S6319295 U JPS6319295 U JP S6319295U JP 11220786 U JP11220786 U JP 11220786U JP 11220786 U JP11220786 U JP 11220786U JP S6319295 U JPS6319295 U JP S6319295U
Authority
JP
Japan
Prior art keywords
positioning table
bed
axis
utility
set forth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11220786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430556Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986112207U priority Critical patent/JPH0430556Y2/ja
Publication of JPS6319295U publication Critical patent/JPS6319295U/ja
Application granted granted Critical
Publication of JPH0430556Y2 publication Critical patent/JPH0430556Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
JP1986112207U 1986-07-22 1986-07-22 Expired JPH0430556Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986112207U JPH0430556Y2 (en, 2012) 1986-07-22 1986-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986112207U JPH0430556Y2 (en, 2012) 1986-07-22 1986-07-22

Publications (2)

Publication Number Publication Date
JPS6319295U true JPS6319295U (en, 2012) 1988-02-08
JPH0430556Y2 JPH0430556Y2 (en, 2012) 1992-07-23

Family

ID=30992862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986112207U Expired JPH0430556Y2 (en, 2012) 1986-07-22 1986-07-22

Country Status (1)

Country Link
JP (1) JPH0430556Y2 (en, 2012)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5325979A (en) * 1976-08-21 1978-03-10 Nippon Telegr & Teleph Corp <Ntt> Cross travelling loading bed
JPS56137207A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Measuring apparatus for two-dimensional coordinate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5325979A (en) * 1976-08-21 1978-03-10 Nippon Telegr & Teleph Corp <Ntt> Cross travelling loading bed
JPS56137207A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Measuring apparatus for two-dimensional coordinate

Also Published As

Publication number Publication date
JPH0430556Y2 (en, 2012) 1992-07-23

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