JPS6319295U - - Google Patents

Info

Publication number
JPS6319295U
JPS6319295U JP11220786U JP11220786U JPS6319295U JP S6319295 U JPS6319295 U JP S6319295U JP 11220786 U JP11220786 U JP 11220786U JP 11220786 U JP11220786 U JP 11220786U JP S6319295 U JPS6319295 U JP S6319295U
Authority
JP
Japan
Prior art keywords
positioning table
bed
axis
utility
set forth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11220786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430556Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986112207U priority Critical patent/JPH0430556Y2/ja
Publication of JPS6319295U publication Critical patent/JPS6319295U/ja
Application granted granted Critical
Publication of JPH0430556Y2 publication Critical patent/JPH0430556Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
JP1986112207U 1986-07-22 1986-07-22 Expired JPH0430556Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986112207U JPH0430556Y2 (enrdf_load_stackoverflow) 1986-07-22 1986-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986112207U JPH0430556Y2 (enrdf_load_stackoverflow) 1986-07-22 1986-07-22

Publications (2)

Publication Number Publication Date
JPS6319295U true JPS6319295U (enrdf_load_stackoverflow) 1988-02-08
JPH0430556Y2 JPH0430556Y2 (enrdf_load_stackoverflow) 1992-07-23

Family

ID=30992862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986112207U Expired JPH0430556Y2 (enrdf_load_stackoverflow) 1986-07-22 1986-07-22

Country Status (1)

Country Link
JP (1) JPH0430556Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5325979A (en) * 1976-08-21 1978-03-10 Nippon Telegr & Teleph Corp <Ntt> Cross travelling loading bed
JPS56137207A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Measuring apparatus for two-dimensional coordinate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104247A (en) * 1976-02-27 1977-09-01 Nippon Chemical Ind Cross motion stage
JPS5325979A (en) * 1976-08-21 1978-03-10 Nippon Telegr & Teleph Corp <Ntt> Cross travelling loading bed
JPS56137207A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Measuring apparatus for two-dimensional coordinate

Also Published As

Publication number Publication date
JPH0430556Y2 (enrdf_load_stackoverflow) 1992-07-23

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