JPS63192459U - - Google Patents

Info

Publication number
JPS63192459U
JPS63192459U JP8315387U JP8315387U JPS63192459U JP S63192459 U JPS63192459 U JP S63192459U JP 8315387 U JP8315387 U JP 8315387U JP 8315387 U JP8315387 U JP 8315387U JP S63192459 U JPS63192459 U JP S63192459U
Authority
JP
Japan
Prior art keywords
reaction tube
main body
vapor phase
front chamber
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8315387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512279Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987083153U priority Critical patent/JPH0512279Y2/ja
Publication of JPS63192459U publication Critical patent/JPS63192459U/ja
Application granted granted Critical
Publication of JPH0512279Y2 publication Critical patent/JPH0512279Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987083153U 1987-05-29 1987-05-29 Expired - Lifetime JPH0512279Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (en:Method) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (en:Method) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192459U true JPS63192459U (en:Method) 1988-12-12
JPH0512279Y2 JPH0512279Y2 (en:Method) 1993-03-29

Family

ID=30936481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987083153U Expired - Lifetime JPH0512279Y2 (en:Method) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0512279Y2 (en:Method)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (en:Method) * 1984-11-20 1986-06-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (en:Method) * 1984-11-20 1986-06-12

Also Published As

Publication number Publication date
JPH0512279Y2 (en:Method) 1993-03-29

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