JPS63192459U - - Google Patents

Info

Publication number
JPS63192459U
JPS63192459U JP8315387U JP8315387U JPS63192459U JP S63192459 U JPS63192459 U JP S63192459U JP 8315387 U JP8315387 U JP 8315387U JP 8315387 U JP8315387 U JP 8315387U JP S63192459 U JPS63192459 U JP S63192459U
Authority
JP
Japan
Prior art keywords
reaction tube
main body
vapor phase
front chamber
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8315387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512279Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987083153U priority Critical patent/JPH0512279Y2/ja
Publication of JPS63192459U publication Critical patent/JPS63192459U/ja
Application granted granted Critical
Publication of JPH0512279Y2 publication Critical patent/JPH0512279Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987083153U 1987-05-29 1987-05-29 Expired - Lifetime JPH0512279Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (cs) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987083153U JPH0512279Y2 (cs) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192459U true JPS63192459U (cs) 1988-12-12
JPH0512279Y2 JPH0512279Y2 (cs) 1993-03-29

Family

ID=30936481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987083153U Expired - Lifetime JPH0512279Y2 (cs) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0512279Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (cs) * 1984-11-20 1986-06-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190856U (cs) * 1984-11-20 1986-06-12

Also Published As

Publication number Publication date
JPH0512279Y2 (cs) 1993-03-29

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