JPS63191632U - - Google Patents

Info

Publication number
JPS63191632U
JPS63191632U JP1987081105U JP8110587U JPS63191632U JP S63191632 U JPS63191632 U JP S63191632U JP 1987081105 U JP1987081105 U JP 1987081105U JP 8110587 U JP8110587 U JP 8110587U JP S63191632 U JPS63191632 U JP S63191632U
Authority
JP
Japan
Prior art keywords
lead wire
plate
thin film
piezoelectric element
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987081105U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445245Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987081105U priority Critical patent/JPH0445245Y2/ja
Publication of JPS63191632U publication Critical patent/JPS63191632U/ja
Application granted granted Critical
Publication of JPH0445245Y2 publication Critical patent/JPH0445245Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Wire Bonding (AREA)
JP1987081105U 1987-05-29 1987-05-29 Expired JPH0445245Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987081105U JPH0445245Y2 (enExample) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987081105U JPH0445245Y2 (enExample) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63191632U true JPS63191632U (enExample) 1988-12-09
JPH0445245Y2 JPH0445245Y2 (enExample) 1992-10-23

Family

ID=30932540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987081105U Expired JPH0445245Y2 (enExample) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0445245Y2 (enExample)

Also Published As

Publication number Publication date
JPH0445245Y2 (enExample) 1992-10-23

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