JPS63191632U - - Google Patents

Info

Publication number
JPS63191632U
JPS63191632U JP1987081105U JP8110587U JPS63191632U JP S63191632 U JPS63191632 U JP S63191632U JP 1987081105 U JP1987081105 U JP 1987081105U JP 8110587 U JP8110587 U JP 8110587U JP S63191632 U JPS63191632 U JP S63191632U
Authority
JP
Japan
Prior art keywords
lead wire
plate
thin film
piezoelectric element
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987081105U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445245Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987081105U priority Critical patent/JPH0445245Y2/ja
Publication of JPS63191632U publication Critical patent/JPS63191632U/ja
Application granted granted Critical
Publication of JPH0445245Y2 publication Critical patent/JPH0445245Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Wire Bonding (AREA)
JP1987081105U 1987-05-29 1987-05-29 Expired JPH0445245Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987081105U JPH0445245Y2 (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987081105U JPH0445245Y2 (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63191632U true JPS63191632U (enrdf_load_stackoverflow) 1988-12-09
JPH0445245Y2 JPH0445245Y2 (enrdf_load_stackoverflow) 1992-10-23

Family

ID=30932540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987081105U Expired JPH0445245Y2 (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0445245Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0445245Y2 (enrdf_load_stackoverflow) 1992-10-23

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