JPS63191629U - - Google Patents
Info
- Publication number
- JPS63191629U JPS63191629U JP8233987U JP8233987U JPS63191629U JP S63191629 U JPS63191629 U JP S63191629U JP 8233987 U JP8233987 U JP 8233987U JP 8233987 U JP8233987 U JP 8233987U JP S63191629 U JPS63191629 U JP S63191629U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- constant temperature
- built
- carrier
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 15
- 239000000243 solution Substances 0.000 claims 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 1
- 239000012670 alkaline solution Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8233987U JPS63191629U (enExample) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8233987U JPS63191629U (enExample) | 1987-05-29 | 1987-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63191629U true JPS63191629U (enExample) | 1988-12-09 |
Family
ID=30934903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8233987U Pending JPS63191629U (enExample) | 1987-05-29 | 1987-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63191629U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722381A (ja) * | 1993-07-06 | 1995-01-24 | Mitsubishi Materials Shilicon Corp | 誘電体分離基板の製造装置と製造方法 |
-
1987
- 1987-05-29 JP JP8233987U patent/JPS63191629U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722381A (ja) * | 1993-07-06 | 1995-01-24 | Mitsubishi Materials Shilicon Corp | 誘電体分離基板の製造装置と製造方法 |