JPS63190959U - - Google Patents
Info
- Publication number
- JPS63190959U JPS63190959U JP1987081109U JP8110987U JPS63190959U JP S63190959 U JPS63190959 U JP S63190959U JP 1987081109 U JP1987081109 U JP 1987081109U JP 8110987 U JP8110987 U JP 8110987U JP S63190959 U JPS63190959 U JP S63190959U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- sealing surface
- flow
- gas
- gas rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 3
Landscapes
- Mounting Of Printed Circuit Boards And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987081109U JPS63190959U (enExample) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987081109U JPS63190959U (enExample) | 1987-05-29 | 1987-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190959U true JPS63190959U (enExample) | 1988-12-08 |
Family
ID=30932547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987081109U Pending JPS63190959U (enExample) | 1987-05-29 | 1987-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190959U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144664A (ja) * | 1984-01-09 | 1985-07-31 | Tamagawa Seiki Kk | ガスレ−トセンサ |
-
1987
- 1987-05-29 JP JP1987081109U patent/JPS63190959U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144664A (ja) * | 1984-01-09 | 1985-07-31 | Tamagawa Seiki Kk | ガスレ−トセンサ |