JPS6319094U - - Google Patents
Info
- Publication number
- JPS6319094U JPS6319094U JP11194686U JP11194686U JPS6319094U JP S6319094 U JPS6319094 U JP S6319094U JP 11194686 U JP11194686 U JP 11194686U JP 11194686 U JP11194686 U JP 11194686U JP S6319094 U JPS6319094 U JP S6319094U
- Authority
- JP
- Japan
- Prior art keywords
- slits
- pair
- stator
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11194686U JPS6319094U (sh) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11194686U JPS6319094U (sh) | 1986-07-21 | 1986-07-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6319094U true JPS6319094U (sh) | 1988-02-08 |
Family
ID=30992357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11194686U Pending JPS6319094U (sh) | 1986-07-21 | 1986-07-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6319094U (sh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006348935A (ja) * | 2005-06-11 | 2006-12-28 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ用ステータ・ディスク |
-
1986
- 1986-07-21 JP JP11194686U patent/JPS6319094U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006348935A (ja) * | 2005-06-11 | 2006-12-28 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ用ステータ・ディスク |
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