JPS63190949U - - Google Patents

Info

Publication number

JPS63190949U

JPS63190949U JP8114987U JP8114987U JPS63190949U JP S63190949 U JPS63190949 U JP S63190949U JP 8114987 U JP8114987 U JP 8114987U JP 8114987 U JP8114987 U JP 8114987U JP S63190949 U JPS63190949 U JP S63190949U

Authority

JP

Japan

Prior art keywords

hole

shaft

half mirror

movable

light source

Prior art date

1987-05-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 2
• 239000010931 gold Substances 0.000 claims 2
• 239000010948 rhodium Substances 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 2
• VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
• 229910004298 SiO 2 Inorganic materials 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
• 229910052737 gold Inorganic materials 0.000 claims 1
• 229910052703 rhodium Inorganic materials 0.000 claims 1
• MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 229910052709 silver Inorganic materials 0.000 claims 1
• 239000004332 silver Substances 0.000 claims 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1