JPS6319090U - - Google Patents

Info

Publication number
JPS6319090U
JPS6319090U JP11315786U JP11315786U JPS6319090U JP S6319090 U JPS6319090 U JP S6319090U JP 11315786 U JP11315786 U JP 11315786U JP 11315786 U JP11315786 U JP 11315786U JP S6319090 U JPS6319090 U JP S6319090U
Authority
JP
Japan
Prior art keywords
casing
pressure
exhaust port
final
roots blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11315786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11315786U priority Critical patent/JPS6319090U/ja
Publication of JPS6319090U publication Critical patent/JPS6319090U/ja
Pending legal-status Critical Current

Links

JP11315786U 1986-07-23 1986-07-23 Pending JPS6319090U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11315786U JPS6319090U (US06826419-20041130-M00005.png) 1986-07-23 1986-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11315786U JPS6319090U (US06826419-20041130-M00005.png) 1986-07-23 1986-07-23

Publications (1)

Publication Number Publication Date
JPS6319090U true JPS6319090U (US06826419-20041130-M00005.png) 1988-02-08

Family

ID=30994690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11315786U Pending JPS6319090U (US06826419-20041130-M00005.png) 1986-07-23 1986-07-23

Country Status (1)

Country Link
JP (1) JPS6319090U (US06826419-20041130-M00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009063890A1 (ja) * 2007-11-14 2009-05-22 Ulvac, Inc. 多段式ドライポンプ
WO2018149598A1 (de) * 2017-02-17 2018-08-23 Leybold Gmbh Mehrstufige wälzkolbenpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146093A (en) * 1980-12-05 1982-09-09 Boc Ltd Mechanical pump
JPS5834320U (ja) * 1981-08-31 1983-03-05 東芝機器株式会社 感震器付照明器具

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146093A (en) * 1980-12-05 1982-09-09 Boc Ltd Mechanical pump
JPS5834320U (ja) * 1981-08-31 1983-03-05 東芝機器株式会社 感震器付照明器具

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009063890A1 (ja) * 2007-11-14 2009-05-22 Ulvac, Inc. 多段式ドライポンプ
JP5073754B2 (ja) * 2007-11-14 2012-11-14 株式会社アルバック 多段式ドライポンプ
WO2018149598A1 (de) * 2017-02-17 2018-08-23 Leybold Gmbh Mehrstufige wälzkolbenpumpe
CN110168227A (zh) * 2017-02-17 2019-08-23 莱宝有限公司 多级罗茨泵
KR20190112002A (ko) * 2017-02-17 2019-10-02 라이볼트 게엠베하 다단 루츠 펌프
JP2020507704A (ja) * 2017-02-17 2020-03-12 レイボルド ゲーエムベーハー 多段式ルーツポンプ
US11255328B2 (en) 2017-02-17 2022-02-22 Leybold Gmbh Multi-stage rotary lobe pump

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