JPS63189566U - - Google Patents

Info

Publication number
JPS63189566U
JPS63189566U JP1987079465U JP7946587U JPS63189566U JP S63189566 U JPS63189566 U JP S63189566U JP 1987079465 U JP1987079465 U JP 1987079465U JP 7946587 U JP7946587 U JP 7946587U JP S63189566 U JPS63189566 U JP S63189566U
Authority
JP
Japan
Prior art keywords
surface plate
plate
workpiece
polishing
swing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987079465U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987079465U priority Critical patent/JPS63189566U/ja
Publication of JPS63189566U publication Critical patent/JPS63189566U/ja
Pending legal-status Critical Current

Links

JP1987079465U 1987-05-26 1987-05-26 Pending JPS63189566U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987079465U JPS63189566U (fr) 1987-05-26 1987-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987079465U JPS63189566U (fr) 1987-05-26 1987-05-26

Publications (1)

Publication Number Publication Date
JPS63189566U true JPS63189566U (fr) 1988-12-06

Family

ID=30929349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987079465U Pending JPS63189566U (fr) 1987-05-26 1987-05-26

Country Status (1)

Country Link
JP (1) JPS63189566U (fr)

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