JPS63189381U - - Google Patents

Info

Publication number
JPS63189381U
JPS63189381U JP8208387U JP8208387U JPS63189381U JP S63189381 U JPS63189381 U JP S63189381U JP 8208387 U JP8208387 U JP 8208387U JP 8208387 U JP8208387 U JP 8208387U JP S63189381 U JPS63189381 U JP S63189381U
Authority
JP
Japan
Prior art keywords
gas
precision cleaning
tank
solvent
circulation path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8208387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8208387U priority Critical patent/JPS63189381U/ja
Publication of JPS63189381U publication Critical patent/JPS63189381U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8208387U 1987-05-28 1987-05-28 Pending JPS63189381U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8208387U JPS63189381U (fr) 1987-05-28 1987-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8208387U JPS63189381U (fr) 1987-05-28 1987-05-28

Publications (1)

Publication Number Publication Date
JPS63189381U true JPS63189381U (fr) 1988-12-06

Family

ID=30934416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8208387U Pending JPS63189381U (fr) 1987-05-28 1987-05-28

Country Status (1)

Country Link
JP (1) JPS63189381U (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5219473A (en) * 1975-08-05 1977-02-14 Mitsubishi Heavy Ind Ltd Method for eliminating solvent dispersion for use in organic solvent c leaning unit
JPS5256765A (en) * 1975-11-06 1977-05-10 Mitsubishi Heavy Ind Ltd Proess for preventing diffusion of solvent vapor in organic solvent wa shing apparatus
JPS5286268A (en) * 1976-01-09 1977-07-18 Mitsubishi Heavy Ind Ltd Method of preventing diffusion of solvent in organic solvent cleaner
JPS58185784A (ja) * 1982-04-22 1983-10-29 Toshiharu Nakai 循環する気流によつて形成されるエヤ−カ−テンにより有害物質の飛散拡散を防止する方法
JPS6144288B2 (fr) * 1979-09-27 1986-10-02 Canon Kk

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5219473A (en) * 1975-08-05 1977-02-14 Mitsubishi Heavy Ind Ltd Method for eliminating solvent dispersion for use in organic solvent c leaning unit
JPS5256765A (en) * 1975-11-06 1977-05-10 Mitsubishi Heavy Ind Ltd Proess for preventing diffusion of solvent vapor in organic solvent wa shing apparatus
JPS5286268A (en) * 1976-01-09 1977-07-18 Mitsubishi Heavy Ind Ltd Method of preventing diffusion of solvent in organic solvent cleaner
JPS6144288B2 (fr) * 1979-09-27 1986-10-02 Canon Kk
JPS58185784A (ja) * 1982-04-22 1983-10-29 Toshiharu Nakai 循環する気流によつて形成されるエヤ−カ−テンにより有害物質の飛散拡散を防止する方法

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