JPS63188944U - - Google Patents
Info
- Publication number
- JPS63188944U JPS63188944U JP1987081315U JP8131587U JPS63188944U JP S63188944 U JPS63188944 U JP S63188944U JP 1987081315 U JP1987081315 U JP 1987081315U JP 8131587 U JP8131587 U JP 8131587U JP S63188944 U JPS63188944 U JP S63188944U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- heater plate
- blowing
- heating
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W72/0711—
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- H10W72/07141—
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- H10W72/075—
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- H10W72/07521—
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- H10W72/536—
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- H10W72/5363—
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- H10W90/754—
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- H10W90/756—
Landscapes
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987081315U JPS63188944U (index.php) | 1987-05-28 | 1987-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987081315U JPS63188944U (index.php) | 1987-05-28 | 1987-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188944U true JPS63188944U (index.php) | 1988-12-05 |
Family
ID=30932942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987081315U Pending JPS63188944U (index.php) | 1987-05-28 | 1987-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188944U (index.php) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61263232A (ja) * | 1985-05-17 | 1986-11-21 | Hitachi Ltd | 半導体装置の製造装置 |
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1987
- 1987-05-28 JP JP1987081315U patent/JPS63188944U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61263232A (ja) * | 1985-05-17 | 1986-11-21 | Hitachi Ltd | 半導体装置の製造装置 |