JPS63188844U - - Google Patents

Info

Publication number
JPS63188844U
JPS63188844U JP8010987U JP8010987U JPS63188844U JP S63188844 U JPS63188844 U JP S63188844U JP 8010987 U JP8010987 U JP 8010987U JP 8010987 U JP8010987 U JP 8010987U JP S63188844 U JPS63188844 U JP S63188844U
Authority
JP
Japan
Prior art keywords
bellows
electrode rod
end plate
vacuum
fixed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8010987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8010987U priority Critical patent/JPS63188844U/ja
Publication of JPS63188844U publication Critical patent/JPS63188844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Diaphragms And Bellows (AREA)
  • Physical Vapour Deposition (AREA)
JP8010987U 1987-05-27 1987-05-27 Pending JPS63188844U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8010987U JPS63188844U (enrdf_load_stackoverflow) 1987-05-27 1987-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8010987U JPS63188844U (enrdf_load_stackoverflow) 1987-05-27 1987-05-27

Publications (1)

Publication Number Publication Date
JPS63188844U true JPS63188844U (enrdf_load_stackoverflow) 1988-12-05

Family

ID=33446786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8010987U Pending JPS63188844U (enrdf_load_stackoverflow) 1987-05-27 1987-05-27

Country Status (1)

Country Link
JP (1) JPS63188844U (enrdf_load_stackoverflow)

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