JPS6318834U - - Google Patents

Info

Publication number

JPS6318834U

JPS6318834U JP11202486U JP11202486U JPS6318834U JP S6318834 U JPS6318834 U JP S6318834U JP 11202486 U JP11202486 U JP 11202486U JP 11202486 U JP11202486 U JP 11202486U JP S6318834 U JPS6318834 U JP S6318834U

Authority

JP

Japan

Prior art keywords

buffer tank

processing chamber

evacuation means

manufacturing apparatus

semiconductor manufacturing

Prior art date

1986-07-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000000034 method Methods 0.000 claims description 2
• 238000006073 displacement reaction Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (4)