JPS63188310U - - Google Patents

Info

Publication number
JPS63188310U
JPS63188310U JP8166387U JP8166387U JPS63188310U JP S63188310 U JPS63188310 U JP S63188310U JP 8166387 U JP8166387 U JP 8166387U JP 8166387 U JP8166387 U JP 8166387U JP S63188310 U JPS63188310 U JP S63188310U
Authority
JP
Japan
Prior art keywords
piston
cylinder
sub
main piston
stop type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8166387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8166387U priority Critical patent/JPS63188310U/ja
Publication of JPS63188310U publication Critical patent/JPS63188310U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP8166387U 1987-05-28 1987-05-28 Pending JPS63188310U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8166387U JPS63188310U (US06623731-20030923-C00012.png) 1987-05-28 1987-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8166387U JPS63188310U (US06623731-20030923-C00012.png) 1987-05-28 1987-05-28

Publications (1)

Publication Number Publication Date
JPS63188310U true JPS63188310U (US06623731-20030923-C00012.png) 1988-12-02

Family

ID=30933606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8166387U Pending JPS63188310U (US06623731-20030923-C00012.png) 1987-05-28 1987-05-28

Country Status (1)

Country Link
JP (1) JPS63188310U (US06623731-20030923-C00012.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50127071A (US06623731-20030923-C00012.png) * 1974-03-25 1975-10-06
JPS57120708A (en) * 1981-01-19 1982-07-27 Tokuda Seisakusho Ltd Intermediate position stop type cylinder
JPS6057004A (ja) * 1983-09-05 1985-04-02 Matsushita Electric Ind Co Ltd 真空装置用往復動シリンダ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50127071A (US06623731-20030923-C00012.png) * 1974-03-25 1975-10-06
JPS57120708A (en) * 1981-01-19 1982-07-27 Tokuda Seisakusho Ltd Intermediate position stop type cylinder
JPS6057004A (ja) * 1983-09-05 1985-04-02 Matsushita Electric Ind Co Ltd 真空装置用往復動シリンダ

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