JPS63187614U - - Google Patents
Info
- Publication number
- JPS63187614U JPS63187614U JP7955787U JP7955787U JPS63187614U JP S63187614 U JPS63187614 U JP S63187614U JP 7955787 U JP7955787 U JP 7955787U JP 7955787 U JP7955787 U JP 7955787U JP S63187614 U JPS63187614 U JP S63187614U
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- fan filter
- frame member
- clean room
- support structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7955787U JPS63187614U (no) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7955787U JPS63187614U (no) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187614U true JPS63187614U (no) | 1988-12-01 |
Family
ID=30929530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7955787U Pending JPS63187614U (no) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187614U (no) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125962A (no) * | 1974-08-27 | 1976-03-03 | Nippon Electric Co | |
| JPS61211438A (ja) * | 1984-12-28 | 1986-09-19 | フラクト アクツイアボラ−ク | クリ−ンル−ム用モジユ−ル型フレ−ム設備 |
-
1987
- 1987-05-26 JP JP7955787U patent/JPS63187614U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125962A (no) * | 1974-08-27 | 1976-03-03 | Nippon Electric Co | |
| JPS61211438A (ja) * | 1984-12-28 | 1986-09-19 | フラクト アクツイアボラ−ク | クリ−ンル−ム用モジユ−ル型フレ−ム設備 |