JPS63185270U - - Google Patents

Info

Publication number

JPS63185270U

JPS63185270U JP7584387U JP7584387U JPS63185270U JP S63185270 U JPS63185270 U JP S63185270U JP 7584387 U JP7584387 U JP 7584387U JP 7584387 U JP7584387 U JP 7584387U JP S63185270 U JPS63185270 U JP S63185270U

Authority

JP

Japan

Prior art keywords

perforations

dividing

alumina

recess

laser

Prior art date

1987-05-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 1