JPS63184047A - Flaw detection apparatus - Google Patents

Flaw detection apparatus

Info

Publication number
JPS63184047A
JPS63184047A JP1688987A JP1688987A JPS63184047A JP S63184047 A JPS63184047 A JP S63184047A JP 1688987 A JP1688987 A JP 1688987A JP 1688987 A JP1688987 A JP 1688987A JP S63184047 A JPS63184047 A JP S63184047A
Authority
JP
Japan
Prior art keywords
memory
image
inspected
thinning
processing circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1688987A
Other languages
Japanese (ja)
Other versions
JPH0692940B2 (en
Inventor
Toshinori Inoue
敏範 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1688987A priority Critical patent/JPH0692940B2/en
Publication of JPS63184047A publication Critical patent/JPS63184047A/en
Publication of JPH0692940B2 publication Critical patent/JPH0692940B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)

Abstract

PURPOSE:To enhance detection accuracy, by accurately confirming the position of an object to be inspected in order to inspect the appearance of the object to be inspected during movement and setting an accurate inspection region. CONSTITUTION:The image of a moving object to be inspected is photographed as a stationary image by a TV camera 2 and a stroboscope 3 and the image data digitized by an A/D converter part 9 is divided into two directions and one of them is stored in a frame memory 4 as the image corresponding to one picture and the other is inputted to a processing circuit 5 through a change- over device 6. Differentiation and thinning processings are performed in synchro nous relation to the clock signal of the camera 2 in the circuit 5 to send the thinning data to the first memory 7. After one picture is processed, the change- over device 6 is changed over from the memory 4 to the image and image data is again sent to the circuit in synchronous relation to the clock signal of the camera 2. Differentiation and thinning processings are performed in the circuit 5 in such a state that a threshold value is changed to send the thin ning data to the second memory 8. By performing the confirmation processing of a flaw part by CPU 13 using the thinning data obtained in the memories 7, 8, the detection reliability and accuracy of a flaw can be enhanced.

Description

【発明の詳細な説明】 (技術分野) 本発明は、移動中の被検査物の外観検査を行うための欠
陥検出装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a defect detection device for visually inspecting a moving object to be inspected.

(背景技術) 従来、被検査物の外観、検査を行うために、テレビカメ
ラにより被検査物の画像を撮影し、その画像信号を微分
し、所定のレベルで細線化することにより欠陥検査を行
う方式が提案されている。この従来例にあっては、被検
査物のエツジ部と欠陥部との微分値に大きな差が生じ、
欠陥部を抽出するための細線化レベルに合わせた場合に
、被検査物のエツジ部を認識するための細線化情報が多
くなり過ぎるために、正確なエツジ部の認識が困難であ
り、誤判断する場合が多いという問題があった。
(Background Art) Conventionally, in order to inspect the appearance of an object to be inspected, an image of the object to be inspected is photographed using a television camera, the image signal is differentiated, and the line is thinned at a predetermined level to perform defect inspection. A method has been proposed. In this conventional example, there is a large difference in the differential value between the edge part and the defective part of the object to be inspected.
When matching the thinning level for extracting defective parts, there is too much thinning information for recognizing the edges of the object to be inspected, making it difficult to accurately recognize the edges and resulting in misjudgments. The problem is that there are many cases where

(発明の目的) 本発明は上述のような点に鑑みてなされたものであり、
その目的とするところは、移動中の被検査物の外観検査
を行うために、被検査物の位置を正確に認識し、正しい
検査領域を設定することによって検出精度を高めた欠陥
検出装置を提供するにある。
(Object of the invention) The present invention has been made in view of the above points, and
The purpose is to provide a defect detection device that accurately recognizes the position of the inspected object and increases detection accuracy by setting the correct inspection area in order to visually inspect the moving inspected object. There is something to do.

(発明の開示) 本発明に係る欠陥検出装置にあっては、第1図及び第3
図に示すように、移動している被検査物1を静止画像入
力するためのテレビカメラ2及びストロボ3と、入力画
像を記憶するフレームメモリー4と、入力画像を実時間
で微分・細線化する処理回路5と、テレビカメラ2から
の画像信号とフレームメモリー4からの画像信号とを処
理回路5に切換入力する切換器6と、テレビカメラ2か
ら処理回路5に入力された画像信号を被検査物1のエツ
ジ部11が認識できるレベルL1で細線化した結果を記
憶する第1メモリー7と、フレームメモリー4から処理
回路5に入力された画像信号を被検査物1の欠陥部12
が抽出できるレベルL2で細線化した結果を記憶する第
2メモリー8とを備えて成るものである。
(Disclosure of the Invention) In the defect detection device according to the present invention, FIGS.
As shown in the figure, there is a television camera 2 and a strobe 3 for inputting a still image of a moving inspection object 1, a frame memory 4 for storing the input image, and a differentiation and thinning of the input image in real time. A processing circuit 5, a switch 6 for switching and inputting the image signal from the television camera 2 and the image signal from the frame memory 4 to the processing circuit 5, and a switch 6 for inputting the image signal input from the television camera 2 to the processing circuit 5 to be inspected. A first memory 7 stores the result of line thinning at a level L1 that allows the edge portion 11 of the object 1 to be recognized, and a defective portion 12 of the object 1 that receives the image signal input from the frame memory 4 to the processing circuit 5.
and a second memory 8 for storing the result of thinning at a level L2 at which the line can be extracted.

本発明はこのように構成されているので、1回目に細線
化したデータで被検査物の輪郭線を認識し、被検査物の
位置と欠陥検査したい領域とを決定し、2回目の細線化
で抽出した欠陥部を含むデータを先に求めた領域内での
み探索することが可能となり、移動中の被検査物の欠陥
抽出を効率的に行い得るものである。
Since the present invention is configured in this manner, the outline of the object to be inspected is recognized using the data thinned in the first time, the position of the object to be inspected and the area to be inspected for defects are determined, and the line thinned in the second time. It becomes possible to search for data including the defective portion extracted in the previously obtained area only, and it is possible to efficiently extract defects in a moving inspected object.

第1図は本発明の一実施例に係る欠陥検出装置の概略構
成を示すブロック図である。テレビカメラ2は、第30
に示すように、移動中の被検査物1を撮影する。A/D
変換部9はテレビカメラ2により得られたアナログの画
像信号をデジタル信号に変換する。この場合、デジタル
信号のビット数は対象物に応じて任意に設定される。フ
レームメモリー4は前述のデジタル信号に変換された画
像データを記憶する。切換器6はテレビカメラ1から直
接入力される画像信号と、フレームメモリー4に一旦記
憶されてから読み出された画像信号とを処理回路5に切
り換えて送る。処理回路5はテレビカメラ1のクロック
信号(垂直同期信号)に同期したスピードで微分・細線
化の処理を行う。
FIG. 1 is a block diagram showing a schematic configuration of a defect detection device according to an embodiment of the present invention. TV camera 2 is the 30th
As shown in FIG. 1, a moving inspection object 1 is photographed. A/D
The converter 9 converts an analog image signal obtained by the television camera 2 into a digital signal. In this case, the number of bits of the digital signal is arbitrarily set depending on the object. The frame memory 4 stores the image data converted into the digital signal described above. The switch 6 switches between an image signal directly input from the television camera 1 and an image signal read out after being stored in the frame memory 4 and sends the same to the processing circuit 5. The processing circuit 5 performs differentiation and line thinning processing at a speed synchronized with the clock signal (vertical synchronization signal) of the television camera 1.

ストロボ3は移動している被検査物1を静止画像として
撮影するために瞬間だけ点灯する。コントローラ10は
ストロボ3の発光タイミングや処理回路5に入力される
画像の切換等の制御を行う。
The strobe 3 is turned on only momentarily to photograph the moving object 1 as a still image. The controller 10 controls the emission timing of the strobe 3 and the switching of images input to the processing circuit 5.

第1メモリー7は被検査¥@1のエツジ部11を抽出し
た細線化画像を記憶するためのメモリーである。第2メ
モリー8は被検査物1の欠陥部12を含む細線化画像を
記憶するためのメモリーである。
The first memory 7 is a memory for storing a thinned image obtained by extracting the edge portion 11 of the inspection target ¥@1. The second memory 8 is a memory for storing a thinned image including the defective portion 12 of the object 1 to be inspected.

CPU13は被検査物1のエツジ部11を細線化データ
から認識して検査領域を設定したり、欠陥部12の認識
や被検査物1の良否判断等を行うものである。
The CPU 13 recognizes the edge portion 11 of the object 1 to be inspected from the thinning data and sets an inspection area, recognizes the defective portion 12, and determines the quality of the object 1 to be inspected.

以下、本実施例の動作について説明する。第3図に示す
ように、矢印Pの方向に移動している被検査物1の画像
を、テレビカメラ2とストロボ3との組み合わせにより
静止画像として撮影し、その画像信号をA/D変換する
。A/D変換部9によりデジタル化された画像データは
2方向に分かれ、一方はフレームメモリー4で1画面分
の画像として記憶され、他方は切換器6を介して処理回
路5に入力される。処理回路5では、テレビカメラ2の
クロック信号に同期して微分及び細線化処理を行い、第
1メモリー7に細線化データを送る。
The operation of this embodiment will be explained below. As shown in FIG. 3, an image of the inspected object 1 moving in the direction of arrow P is photographed as a still image by a combination of a television camera 2 and a strobe 3, and the image signal is A/D converted. . The image data digitized by the A/D converter 9 is divided into two directions; one is stored in the frame memory 4 as an image for one screen, and the other is input to the processing circuit 5 via the switch 6. The processing circuit 5 performs differentiation and thinning processing in synchronization with the clock signal of the television camera 2, and sends thinning data to the first memory 7.

第4図(a)は第1メモリー7に得られる細線化データ
の例を示す図である。同図において、11は被検査物1
のエツジ部である。
FIG. 4(a) is a diagram showing an example of thinning data obtained in the first memory 7. In the figure, 11 is the object to be inspected 1
This is the edge part.

第5図は微分及び細線化処理の動作説明図である。同図
の波形は、第3図に示す被検査物1のA−A’線につい
ての画像信号の微分値eを示している。Llはエツジ部
抽出のためのスレショルド値であり、L2は欠陥部抽出
のためのスレショルド値である。
FIG. 5 is an explanatory diagram of the operation of differentiation and thinning processing. The waveform in the figure shows the differential value e of the image signal with respect to the line AA' of the object to be inspected 1 shown in FIG. Ll is a threshold value for edge extraction, and L2 is a threshold value for defect extraction.

1画面分の処理が終了した後に、直ちに切換器6をフレ
ームメモリー4からの画像に切り換えて、再びテレビカ
メラ2のクロック信号に同期して切換器6を介して処理
回路5に画像データを送る。
After the processing for one screen is completed, the switch 6 is immediately switched to the image from the frame memory 4, and the image data is sent to the processing circuit 5 via the switch 6 again in synchronization with the clock signal of the television camera 2. .

処理回路5にて再び微分及び細線化の処理を、スレショ
ルド値を変えて行い、第2メモリー8に細線化データを
送る。第4図(b)は第2メモリー8に得られる細線化
データの例を示す図である。同図において、12は被検
査物1の欠陥部である。
The processing circuit 5 performs differentiation and thinning processing again by changing the threshold value, and sends the thinning data to the second memory 8. FIG. 4(b) is a diagram showing an example of thinning data obtained in the second memory 8. In the figure, 12 is a defective portion of the object 1 to be inspected.

これらの第1メモリー7と第2メモリー8に得られた細
線化データを用いてCPU13により欠陥部12の認識
処理を行う。
Using the thinning data obtained in the first memory 7 and the second memory 8, the CPU 13 performs recognition processing for the defective portion 12.

第2図は以上の処理タイミングを示す図である。FIG. 2 is a diagram showing the above processing timing.

第2図(a)はテレビカメラ2の垂直同期信号、同図(
b)は画像処理開始信号、同図(e)はストロボ3の発
光信号、同図(d)は画像メモリー信号、同図(e)は
メモリー画像出力信号、同[1(f)は微分細線化処理
のタイミング、同図(g)はスレショルド値L1による
細線化処理のタイミング、同図(h)はスレショルド値
し2による細線化のタイミング、同図(i>はCPU1
3による画像処理のタイミングをそれぞれ示している。
Figure 2(a) shows the vertical synchronization signal of the television camera 2;
b) is the image processing start signal, (e) is the light emission signal of strobe 3, (d) is the image memory signal, (e) is the memory image output signal, and (1 (f) is the differential line). (g) is the timing of the thinning process using the threshold value L1, (h) is the timing of the thinning process using the threshold value L2, and (i> is the timing of the thinning process using the threshold value L1).
3 shows the timing of image processing according to 3.

(発明の効果) 以上のように本発明にあっては、移動中の被検査物の画
像をストロボとテレビカメラとで静止画像として取り込
むと共にフレームメモリーに記憶し、テレビカメラから
処理回路に入力された画像信号を被検査物のエツジ部が
認識できるレベルで細線化すると共に、フレームメモリ
ーから処理回路に入力された画像信号を被検査物の欠陥
部が抽出できるレベルで細線化するようにしなので、先
に細線化したデータで被検査物の輪郭線を認識し、被検
査物の位置と欠陥検査したい領域とを決定し、2回目の
細線化で抽出した欠陥部を含むデータを先に求めた領域
内でのみ探索することが可能となり、欠陥検出の信頼性
と精度を向上させることができるという効果がある。ま
た、1回目の微分及び細線化処理はテレビカメラから取
り込まれた画像信号を直接用いて行うようにしたから、
高速な処理が可能になり、また、フレームメモリーは1
画面分のみで良いという利点がある。
(Effects of the Invention) As described above, according to the present invention, an image of a moving object to be inspected is captured as a still image using a strobe and a television camera, is stored in a frame memory, and is input from the television camera to a processing circuit. At the same time, the image signal input from the frame memory to the processing circuit is thinned to a level that allows the detection of defective parts of the object to be inspected. Recognize the outline of the object to be inspected using the previously thinned data, determine the position of the object and the area to be inspected for defects, and first obtain data including the defective areas extracted in the second thinning. It becomes possible to search only within the area, which has the effect of improving the reliability and accuracy of defect detection. In addition, since the first differentiation and thinning process was performed directly using the image signal captured from the television camera,
High-speed processing is possible, and the frame memory is 1
It has the advantage that it only needs to cover the screen.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例に係る欠陥検出装置の概略構
成を示すブロック図、第2図は同上の動作説明図、第3
図は同上に用いる光学系の概略構成を示す斜視図、第4
図(a)(b)は同上に用いる第1メモリー及び第2メ
モリーに得られる画像をそれぞれ示す図、第5図は同上
に用いる処理回路の動作説明図である。 1は被検査物、2はテレビカメラ、3はストロボ、4は
フレームメモリー、5は処理回路、6は切換器、7は第
1メモリー、8は第2メモリーである。
FIG. 1 is a block diagram showing a schematic configuration of a defect detection device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of the same operation, and FIG.
The figure is a perspective view showing the schematic configuration of the optical system used in the above.
Figures (a) and (b) are diagrams respectively showing images obtained in the first memory and second memory used in the same, and FIG. 5 is an explanatory diagram of the operation of the processing circuit used in the same. 1 is an object to be inspected, 2 is a television camera, 3 is a strobe, 4 is a frame memory, 5 is a processing circuit, 6 is a switch, 7 is a first memory, and 8 is a second memory.

Claims (1)

【特許請求の範囲】[Claims] (1)移動している被検査物を静止画像入力するための
テレビカメラ及びストロボと、入力画像を記憶するフレ
ームメモリーと、入力画像を実時間で微分・細線化する
処理回路と、テレビカメラからの画像信号とフレームメ
モリーからの画像信号とを処理回路に切換入力する切換
器と、テレビカメラから処理回路に入力された画像信号
を被検査物のエッジ部が認識できるレベルで細線化した
結果を記憶する第1メモリーと、フレームメモリーから
処理回路に入力された画像信号を被検査物の欠陥部が抽
出できるレベルで細線化した結果を記憶する第2メモリ
ーとを備えて成ることを特徴とする欠陥検出装置。
(1) A television camera and strobe for inputting still images of a moving object to be inspected, a frame memory for storing input images, a processing circuit for differentiating and thinning input images in real time, and a television camera. A switch that switches and inputs the image signal from the frame memory and the image signal from the frame memory to the processing circuit, and a switch that thins the image signal input from the television camera to the processing circuit to a level that allows the edges of the object to be inspected to be recognized. It is characterized by comprising a first memory for storing the image signal and a second memory for storing the result of thinning the image signal inputted from the frame memory to the processing circuit to a level that allows extraction of defective parts of the object to be inspected. Defect detection equipment.
JP1688987A 1987-01-27 1987-01-27 Defect detection device Expired - Lifetime JPH0692940B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1688987A JPH0692940B2 (en) 1987-01-27 1987-01-27 Defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1688987A JPH0692940B2 (en) 1987-01-27 1987-01-27 Defect detection device

Publications (2)

Publication Number Publication Date
JPS63184047A true JPS63184047A (en) 1988-07-29
JPH0692940B2 JPH0692940B2 (en) 1994-11-16

Family

ID=11928731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1688987A Expired - Lifetime JPH0692940B2 (en) 1987-01-27 1987-01-27 Defect detection device

Country Status (1)

Country Link
JP (1) JPH0692940B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7307713B2 (en) * 2003-12-19 2007-12-11 Vistec Semiconductor Systems Gmbh Apparatus and method for inspection of a wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7307713B2 (en) * 2003-12-19 2007-12-11 Vistec Semiconductor Systems Gmbh Apparatus and method for inspection of a wafer

Also Published As

Publication number Publication date
JPH0692940B2 (en) 1994-11-16

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