JPS63183545U - - Google Patents
Info
- Publication number
- JPS63183545U JPS63183545U JP7394287U JP7394287U JPS63183545U JP S63183545 U JPS63183545 U JP S63183545U JP 7394287 U JP7394287 U JP 7394287U JP 7394287 U JP7394287 U JP 7394287U JP S63183545 U JPS63183545 U JP S63183545U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- element formation
- appearance inspection
- formation surface
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394287U JPS63183545U (OSRAM) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394287U JPS63183545U (OSRAM) | 1987-05-18 | 1987-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63183545U true JPS63183545U (OSRAM) | 1988-11-25 |
Family
ID=30918721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7394287U Pending JPS63183545U (OSRAM) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63183545U (OSRAM) |
-
1987
- 1987-05-18 JP JP7394287U patent/JPS63183545U/ja active Pending
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