JPS63183534U - - Google Patents

Info

Publication number
JPS63183534U
JPS63183534U JP7434987U JP7434987U JPS63183534U JP S63183534 U JPS63183534 U JP S63183534U JP 7434987 U JP7434987 U JP 7434987U JP 7434987 U JP7434987 U JP 7434987U JP S63183534 U JPS63183534 U JP S63183534U
Authority
JP
Japan
Prior art keywords
specimen
closure body
vacuum chamber
component
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7434987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7434987U priority Critical patent/JPS63183534U/ja
Publication of JPS63183534U publication Critical patent/JPS63183534U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
JP7434987U 1987-05-20 1987-05-20 Pending JPS63183534U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7434987U JPS63183534U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7434987U JPS63183534U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS63183534U true JPS63183534U (enrdf_load_stackoverflow) 1988-11-25

Family

ID=30919484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7434987U Pending JPS63183534U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS63183534U (enrdf_load_stackoverflow)

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