JPS63182535U - - Google Patents

Info

Publication number
JPS63182535U
JPS63182535U JP7393787U JP7393787U JPS63182535U JP S63182535 U JPS63182535 U JP S63182535U JP 7393787 U JP7393787 U JP 7393787U JP 7393787 U JP7393787 U JP 7393787U JP S63182535 U JPS63182535 U JP S63182535U
Authority
JP
Japan
Prior art keywords
wafer
holding part
wafers
detection section
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7393787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7393787U priority Critical patent/JPS63182535U/ja
Publication of JPS63182535U publication Critical patent/JPS63182535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP7393787U 1987-05-18 1987-05-18 Pending JPS63182535U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7393787U JPS63182535U (US20090163788A1-20090625-C00002.png) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7393787U JPS63182535U (US20090163788A1-20090625-C00002.png) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63182535U true JPS63182535U (US20090163788A1-20090625-C00002.png) 1988-11-24

Family

ID=30918711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7393787U Pending JPS63182535U (US20090163788A1-20090625-C00002.png) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63182535U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329256A (ja) * 2006-06-07 2007-12-20 Nec Electronics Corp 薄板材の搬送装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60252535A (ja) * 1984-05-30 1985-12-13 Fujitsu Ltd 基板搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60252535A (ja) * 1984-05-30 1985-12-13 Fujitsu Ltd 基板搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329256A (ja) * 2006-06-07 2007-12-20 Nec Electronics Corp 薄板材の搬送装置
JP4627515B2 (ja) * 2006-06-07 2011-02-09 ルネサスエレクトロニクス株式会社 薄板材の搬送装置

Similar Documents

Publication Publication Date Title
JPS63182535U (US20090163788A1-20090625-C00002.png)
JPH038455U (US20090163788A1-20090625-C00002.png)
JPS63193843U (US20090163788A1-20090625-C00002.png)
JPS62104756U (US20090163788A1-20090625-C00002.png)
JPS63105335U (US20090163788A1-20090625-C00002.png)
JPH03106727U (US20090163788A1-20090625-C00002.png)
JPS6339942U (US20090163788A1-20090625-C00002.png)
JPH0289823U (US20090163788A1-20090625-C00002.png)
JPH04736U (US20090163788A1-20090625-C00002.png)
JPH03110858U (US20090163788A1-20090625-C00002.png)
JPH029438U (US20090163788A1-20090625-C00002.png)
JPS6318843U (US20090163788A1-20090625-C00002.png)
JPS6351445U (US20090163788A1-20090625-C00002.png)
JPS62172647U (US20090163788A1-20090625-C00002.png)
JPH0195275U (US20090163788A1-20090625-C00002.png)
JPH0192863U (US20090163788A1-20090625-C00002.png)
JPH0265341U (US20090163788A1-20090625-C00002.png)
JPH01145123U (US20090163788A1-20090625-C00002.png)
JPS61177535U (US20090163788A1-20090625-C00002.png)
JPH0250833U (US20090163788A1-20090625-C00002.png)
JPS6351682U (US20090163788A1-20090625-C00002.png)
JPS61123771U (US20090163788A1-20090625-C00002.png)
JPS6426844U (US20090163788A1-20090625-C00002.png)
JPS63135868U (US20090163788A1-20090625-C00002.png)
JPS6427608U (US20090163788A1-20090625-C00002.png)