JPS63182290U - - Google Patents

Info

Publication number
JPS63182290U
JPS63182290U JP7284087U JP7284087U JPS63182290U JP S63182290 U JPS63182290 U JP S63182290U JP 7284087 U JP7284087 U JP 7284087U JP 7284087 U JP7284087 U JP 7284087U JP S63182290 U JPS63182290 U JP S63182290U
Authority
JP
Japan
Prior art keywords
duct
drainage
vacuum pump
drainage duct
buffer tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7284087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0755341Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987072840U priority Critical patent/JPH0755341Y2/ja
Publication of JPS63182290U publication Critical patent/JPS63182290U/ja
Application granted granted Critical
Publication of JPH0755341Y2 publication Critical patent/JPH0755341Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
JP1987072840U 1987-05-18 1987-05-18 真空ポンプ用排水ダクト Expired - Lifetime JPH0755341Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987072840U JPH0755341Y2 (ja) 1987-05-18 1987-05-18 真空ポンプ用排水ダクト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987072840U JPH0755341Y2 (ja) 1987-05-18 1987-05-18 真空ポンプ用排水ダクト

Publications (2)

Publication Number Publication Date
JPS63182290U true JPS63182290U (enrdf_load_stackoverflow) 1988-11-24
JPH0755341Y2 JPH0755341Y2 (ja) 1995-12-20

Family

ID=30916645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987072840U Expired - Lifetime JPH0755341Y2 (ja) 1987-05-18 1987-05-18 真空ポンプ用排水ダクト

Country Status (1)

Country Link
JP (1) JPH0755341Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101689A (ja) * 1984-10-23 1986-05-20 Toshiba Corp 放射性排ガス処理装置用真空ポンプ設備
JPS61113287U (enrdf_load_stackoverflow) * 1984-12-28 1986-07-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101689A (ja) * 1984-10-23 1986-05-20 Toshiba Corp 放射性排ガス処理装置用真空ポンプ設備
JPS61113287U (enrdf_load_stackoverflow) * 1984-12-28 1986-07-17

Also Published As

Publication number Publication date
JPH0755341Y2 (ja) 1995-12-20

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