JPS63182290A - Device for production semiconductor crystal - Google Patents

Abstract

PURPOSE:To produced many semiconductor crystals with less variations in the quality by providing a mechanism for impressing a magnetic field in soln. reservoir wherein a material to be used for the growth of the semiconductor crystal is melted to produced many solns. for growing the semiconductor crystal having a more uniform composition. CONSTITUTION:The device for producing a semiconductor crystal has the following structure. Namely, a soln. storage jig 11 having plural soln. storage recesses 12, the soln. reservoir 13 positioned on the soln. storage jig 11, and the mechanism (a magnetic field impressing coil 16 and a coil terminal 17) for impressing a magnetic field in the soln. reservoir 13 are provided. The materials used for the growth of a semiconductor crystal are melted and mixed in the soln. reservoir 13, the soln. 14 consisting of the materials is distributed into the soln. storage recess 12, and solns. used for the growth of plural semiconductor crystal are produced.

Description

[Detailed description of the invention] Industrial applications The present invention relates to an apparatus for manufacturing semiconductor crystals.

Conventional technology When growing semiconductor crystals, the materials required for growth are weighed and charged into the growth equipment to obtain the required crystal, but weighing the growth materials each time it is grown is too time-consuming. Therefore, a conventional method has been adopted in which a large number of growth solutions are prepared at once using an apparatus as shown in FIG. 2, and the crystal growth is performed using these solutions.

In FIG. 2, the growth material charged into the solution reservoir 23 is maintained at a high temperature above the saturation temperature of the solution for a certain period of time to be dissolved and mixed, and then the solution reservoir slide rod 26
After the solution reservoir 23 was slid on the solution storage jig 21 through the solution reservoir and the solution 24 in the solution reservoir was distributed into the solution storage recess 22, crystal growth was performed using the solution 24.

Problems to be Solved by the Invention However, in the above configuration, before the solution 24 in the solution reservoir is distributed into the solution storage recess 22, the solution reservoir 2
Solution 2 in the reservoir by sliding 3 several times
Attempts have been made to stir the solution 4 and then distribute it into the solution storage recesses 22, but the composition within the solution 24 in the solution reservoir could not be made sufficiently uniform, and the number of solution storage recesses 22 and the solution As the amount of solution 24 increases, the amount of solution 24 in the solution reservoir increases.
The compositional non-uniformity within the solution storage cavity 22 further increases, resulting in an increase in the degree of compositional difference between the solutions distributed in the solution storage recess 22 and a degree of quality difference between the semiconductor crystals grown by the solution. The problem was that the amount of

An object of the present invention is to provide a semiconductor crystal manufacturing apparatus that can improve the conventional drawbacks, manufacture a large number of solutions used for growing semiconductor crystals with more uniform composition, and manufacture a large number of semiconductor crystals with little difference in quality. With the goal.

Means for Solving the Interference Point The present invention achieves the above object by having a mechanism for applying a magnetic field within the solution reservoir.

Effect of the Invention With the above-described configuration, the present invention can cause forced convection by applying a magnetic field to a solution made of materials used for growing semiconductor crystals dissolved and mixed in a solution reservoir, so that the composition of the solution can be made uniform. As a result, a large number of solutions used for growing semiconductor crystals having a uniform composition can be produced.

Embodiment FIG. 1 shows a sectional view of a semiconductor crystal manufacturing apparatus in an embodiment of the present invention. In FIG. 1, materials used for growing semiconductor crystals are placed in a solution reservoir 13, maintained at a high temperature above the saturation temperature, and melted and mixed. At this time, when a magnetic field is applied to the solution 14 in the solution reservoir by applying a current to the magnetic field application coil 16 embedded in the side wall of the solution reservoir 13 through the coil terminal 17, the solution 14 in the solution reservoir The magnetic field causes forced convection, resulting in a uniform composition.

The solution 14 in the solution reservoir, which has a uniform composition with the above-mentioned configuration, can be removed by sliding the solution reservoir 13 on the solution storage jig 11 via the solution reservoir slide rod 16.
The quality difference between the semiconductor crystals distributed in the solution containing recess 12 and grown by this solution was significantly smaller than in the past.

And in the above examples, In was used as the solvent.

InP, InAs, and GaAs f as two materials
The ratio of M to In is 0.34% and 7.29, respectively.
% and 11.2%, it is possible to obtain a large number of growth solutions with significantly better uniformity than before, and by using this solution to form an InGaAsP layer on an InP substrate, A large number of Inq with significantly less compositional variation
I was able to obtain sP crystals.

In this embodiment, the magnetic field applying coil 16 is embedded in the side wall of the solution reservoir 13;
The magnetic field applying coils may be arranged in any manner as long as the magnetic field can be applied within the range.

Effects of the Invention As explained above, according to the present invention, a large number of solutions used for growing semiconductor crystals can be prepared with great uniformity, and the practical effects thereof are great.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a semiconductor crystal manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a conventional semiconductor crystal manufacturing apparatus. 11...Solution storage jig, 12...Solution storage recess, 13...Solution reservoir, 14...
・Solution in solution reservoir, 16... Slide rod for solution reservoir, 16... Coil for applying magnetic field, 17...
...Coil terminal.

Claims (2)

[Claims] (1) A solution storage jig having a plurality of solution storage recesses, a solution reservoir located on this solution storage jig, and a mechanism for applying a magnetic field within this solution reservoir, and a semiconductor crystal in the solution reservoir. 1. An apparatus for manufacturing a semiconductor crystal, characterized in that after dissolving and mixing materials used for the growth of a plurality of semiconductor crystals, a solution made of the materials is distributed into the solution storage recess to produce a solution used for the growth of a plurality of semiconductor crystals. (2) A semiconductor crystal manufacturing apparatus characterized in that a mechanism for applying a magnetic field within the solution reservoir causes convection of a solution in the solution reservoir.