JPS63182281A - Tool for burning electronic part or like - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention is applicable to shelf boards, plywood, safeters, or boxes used when firing electronic components such as ceramic capacitors and ferrites, or alumina porcelain and other objects to be fired. Concerning jigs such as pots.

[Conventional technology]

Usually, when firing electronic parts such as ceramic capacitors, A1tOz quality or 3^1zoi 2 sto.

A center made of high-purity Alz (h quality, ZrQ□ quality, or MgO quality) is placed on a jig such as a shelf board made of aluminum, and the object to be fired is RCed and fired on the setter.

[Problem that the invention seeks to solve]

However, the above-described baking jig such as a shelf board has the following problems.

+11 Since a setter is used, the heat storage loss is large.

(2) Since there is a center, damage to the setter when setting the jig and unloading the product from the jig becomes a bottleneck, making it difficult to automate the process of loading and unloading the materials to be fired from the jig.

In order to solve this problem, for example,
Like the multilayer container for heat treatment of electronic industrial parts described in Publication No. 26, Zr0 is added to the inside of the bottom of the AIJ3-Sing container body.
There are known firing jigs that have an integral T layer.
Zr0z due to the difference in thermal expansion between the jig body and ZrO, ¥tN
There is a risk of cracking or peeling of the material layer.

SUMMARY OF THE INVENTION Therefore, the present invention aims to provide a jig for firing electronic components, etc., which can reduce M heat loss, automate the process of loading and unloading objects to be fired, and prevent the occurrence of cracks, peeling, etc. be.

[Means for solving problems]

In order to solve the above-mentioned problems, the present invention provides a high-purity Anzu Z
It is made of one or more of r0z, AI, O, and MgO, and is formed by separating a plurality of covering parts each having a thickness of 50 to 400 μm and an area of 50 cd or less.

[Function] According to the above means, it is possible to directly place the object to be fired on each coating part, and the stress strain due to the difference in thermal expansion between the jig body and the coating layer is reduced by the gap between adjacent coating parts. Absorption is relieved.

However, if the coating thickness is less than μm, a reaction between the jig body and the object to be fired will occur, and if it exceeds 400 μm, the coating layer will peel off rapidly.

In addition, if the area of each coating portion exceeds 50 cm2, the jig body is likely to warp or crack, or the coating layer may peel off due to stress strain due to the difference in thermal expansion between the jig body and the coating layer. Therefore, it is desirable that the minimum area of the covering part is 1cI11 or more, and if it is less than 1crA, the object to be fired may protrude from the covering part.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view of a shelf board 1 for ferrite firing according to the first embodiment.
Weight% shelf board body (300LX15011X8tll)
On one flat side of 2, there is a square section with - side of 30tm,
Adjacent compartments were separated by 5 sodium bicarbonate to form 36 base-like compartments, and each compartment contained 4% by weight of CaO.
The coating part 3 of □ has a coating of 200 to 250 by plasma spraying.
It is formed with a thickness of μm.

FIGS. 2 and 3 are a plan view and a front view of a shelf board 4 for ferrite firing according to a second embodiment.
is A1□0. Shelf board body with quality 98% by weight (300L x 1
50 @x8m) Multiple convex portions 6 and concave portions 7 on one side of 5
A stabilized Z film containing 4% by weight of CaO was formed on the uneven surface with a 5-fi pitch (3 m convex part, 2 concave parts) and 1 n depth.
The covering portion 8 of rO, is perpendicular to the shelf body 5 (90
200-250 μm by plasma spraying (at an angle of °)
It is formed with a thickness of .

FIG. 4 is a sectional view of a main part of a shelf board 4' for ferrite firing according to the third embodiment. While the coating portion 8 was formed by plasma spraying, the coating portion 9 was formed by plasma spraying at an angle of approximately 85″ to the shelf body 5, and one side of the convex portion 6 was coated. Since this embodiment is substantially the same as that of the second embodiment except that part 9 is not formed, the same constituent members will be given the same reference numerals and their explanation will be omitted.

Here, the ferrite firing shelf board 1.4 of each of the above embodiments.
Table 1 shows the results of the thermal and thermal tests (including a comparative example in which a sprayed film was formed on the entire surface of the shelf board body) when the thickness of the coating parts 3 and 8.9 of 4' was changed.

Therefore, when the thickness of the covering portions 3, 8.9 is less than 50 μm, a reaction occurs between the shelf board body 2.5 and the object to be fired,
Furthermore, it can be seen that when the thickness exceeds 400 μm, the coating portion 3.8.9 peels off rapidly.

* * Also, there is less warping when the covering parts 3 and 8 are formed on both sides than when forming them on only one side, and there is less warping when a gap is formed between the adjacent covering parts 3 and 9. It can be seen that there are few

Therefore, when the covering portion 8 is formed on the uneven surface of the shelf body 5, the stress strain caused by the difference in thermal expansion between the shelf body 5 and the covering portion 8 is concentrated in the concave portion of the covering portion 8, and This prevents the coating portion 8 from peeling off or the shelf body 5 from warping due to cracks occurring in the portions.

Furthermore, when the shelf board body 5 coated with the uneven metal surface is repeatedly heated and used, cracks may occur in areas other than the concave portions, and although no cracks occur, the shelf board body 5 may warp significantly. In the case of a combination of the coating material and the main body material, the angle of the nozzle of the thermal spray gun should be set at 4 degrees with respect to the uneven shelf body.
By tilting within a range of 5" or more, parts where the covering part 9 is not formed will be created in the recessed part of the part shaded by the convex part, and as in the case of the first embodiment, the peeling of the covering part 9 will occur. Alternatively, it is possible to prevent the shelf body 5 from warping. In this case, if the nozzle angle is less than 45'', the thermal spraying efficiency will drop significantly, which is not preferable.

The covering portions 3 and 8.9 may be formed not only on the shelf board body 2.5 but also on plywood, a center or a baking jig such as a sagger on which objects to be baked are placed, and The shape of the covering part is not limited to square or short shelf shape, but may be rectangular or rectangular depending on the shape of the object to be fired.
It may be of any shape such as circular, elliptical, polygonal, or linear.

Also, the jig body is A1. Not limited to the case where the main component is 3A]□0.・2SiO□ or 2Mg0・
2^1.03 ・5 Sin, etc. may be used as the main component.

Furthermore, the coating material is not limited to high-purity stabilized ZrO□ (CaO stabilized), for example, high-purity stabilized ZrO@ (Yz
O3 or MgO stabilization), ^1.0. Alternatively, it may be used alone or as a mixture of two or more of MgO and the like.

Furthermore, it is desirable that the gap between the coated parts be approximately 1 to 1 Lot, depending on the shape of the object to be fired.

It is technically difficult to form an average coated area with a gap of less than 1 square, and if the gap exceeds 10, depending on the shape of the object to be fired, it may come into contact with the jig body during firing and react. There is a risk of

〔Effect of the invention〕

As described above, according to the present invention, the following effects can be obtained compared to the conventional technology.

(1) Since the object to be fired can be placed directly on the covering portion, a conventional setter is not required, and heat storage loss can be reduced.

(2) A setter is no longer required, the process of loading and unloading the center from baking jigs such as shelves can be omitted, and the objects to be fired can be unloaded by tilting the jig, making it easy to automate the loading and unloading process. Become.

(3) Stress and strain caused by the difference in thermal expansion between the jig body and the coating part are absorbed and relaxed by the gaps between the adjacent coating parts, so warping and cracking of the jig body, cracks in the coating part, and I, 11 separation can be prevented. It can be prevented.

(4) If the firing jig is a setter, by forming a covering part on the center body made of inexpensive and lightweight material,
The cost of the setter can be reduced, the weight can be reduced, and the life of the setter can be increased.

[Brief explanation of the drawing]

The figures show embodiments of the present invention, and FIG. 1 is a plan view of a shelf board according to the first embodiment, FIGS. 2 and 3 are a plan view and a front view of a shelf board according to the second embodiment, and FIGS. FIG. 4 is a sectional view of the main part of the shelf board of the third embodiment. 2-----One shelf body 3-1111 Covering portion 5----One shelf body 6--Convex portion 7--One concave portion 8.9- -----One covering part

Claims (3)

[Claims] (1) At least the part of the jig body where the object to be fired is placed is made of one or more of high-purity ZrO_2, Al_2O_3, and MgO, and has a thickness of 50 to 400 μm.
A jig for firing electronic components, etc., characterized in that a plurality of covering portions having an area of 50 cm^2 or less are formed at a distance from each other. (2) A jig for firing electronic components or the like according to claim 1, wherein each of the covering portions is formed on a flat portion provided on a jig main body. (3) A jig for firing electronic components or the like according to claim 1, wherein each of the covering portions is formed on the upper surface of a large number of convex portions provided on a jig main body.