JPS63182054U - - Google Patents

Info

Publication number
JPS63182054U
JPS63182054U JP7207787U JP7207787U JPS63182054U JP S63182054 U JPS63182054 U JP S63182054U JP 7207787 U JP7207787 U JP 7207787U JP 7207787 U JP7207787 U JP 7207787U JP S63182054 U JPS63182054 U JP S63182054U
Authority
JP
Japan
Prior art keywords
rays
plasma
gas plasma
ray source
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7207787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7207787U priority Critical patent/JPS63182054U/ja
Publication of JPS63182054U publication Critical patent/JPS63182054U/ja
Pending legal-status Critical Current

Links

Landscapes

  • X-Ray Techniques (AREA)
JP7207787U 1987-05-14 1987-05-14 Pending JPS63182054U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7207787U JPS63182054U (es) 1987-05-14 1987-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7207787U JPS63182054U (es) 1987-05-14 1987-05-14

Publications (1)

Publication Number Publication Date
JPS63182054U true JPS63182054U (es) 1988-11-24

Family

ID=30915209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7207787U Pending JPS63182054U (es) 1987-05-14 1987-05-14

Country Status (1)

Country Link
JP (1) JPS63182054U (es)

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